Chip with different types of resonators and related timing products
AssigneeSkyworks Solutions, Inc.
InventorSrisai Rao Seethamraju
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Abstract
Aspects of this disclosure relate to a chip that includes two types of resonators with different properties. For example, the chip can include a piezoelectric microelectromechanical systems (MEMS) resonator and an electrostatic MEMS resonator. One type of resonator can provide lower phase noise than the other type of resonator, and the other type of resonator can have less variation over temperature. A phase-locked loop can receive reference signals from the two types of resonators. Related MEMS resonator chips, timing products, and methods are disclosed.
Claims20
A timing product comprising:
- a microelectromechanical systems (MEMS) resonator chip including a substrate, a piezoelectric MEMS resonator on the substrate, and an electrostatic MEMS resonator on the substrate;
- and
- a phase-locked loop configured to receive a first reference signal that is generated using the piezoelectric MEMS resonator, and to receive a second reference signal that is generated using the electrostatic MEMS resonator.
A timing product comprising:
- a first type of resonator;
- a second type of resonator on a same die as the first type of resonator, the first type of resonator providing lower phase noise than the second type of resonator, and the second type of resonator having less variation over temperature than the first type of resonator;
- and
- a phase-locked loop configured to receive a first reference signal that is generated using the first type of resonator, and to receive a second reference signal that is generated using the second type of resonator.
A method of generating a clock signal, the method comprising:
- providing a first reference signal generated using a piezoelectric microelectromechanical systems (MEMS) resonator to a phase-locked loop;
- providing a second reference signal generated using an electrostatic MEMS resonator to the phase-locked loop, the electrostatic MEMS resonator and the piezoelectric MEMS resonator being included on a single chip;
- and
- outputting the clock signal from the phase-locked loop.
Dependencies are inferred from the claim text.