H03H 9/02047
Treatment of substrates
Official title: {Treatment of substrates}
H03H9/02047 (Treatment of substrates) appears on 113 US grants and 140 published applications in this corpus.
Search patents in H03H- Granted patents
- 113
- Published applications
- 140
- Assignees
- 64
- Inventors
- 250
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 2003 | 0 | 1 |
| 2004 | 1 | 1 |
| 2005 | 1 | 0 |
| 2006 | 0 | 2 |
| 2007 | 0 | 3 |
| 2008 | 0 | 0 |
| 2009 | 0 | 3 |
| 2010 | 2 | 2 |
| 2011 | 1 | 2 |
| 2012 | 1 | 2 |
| 2013 | 1 | 5 |
| 2014 | 6 | 6 |
| 2015 | 3 | 3 |
| 2016 | 3 | 0 |
| 2017 | 4 | 15 |
| 2018 | 6 | 8 |
| 2019 | 4 | 16 |
| 2020 | 18 | 15 |
| 2021 | 12 | 13 |
| 2022 | 10 | 10 |
| 2023 | 11 | 16 |
| 2024 | 15 | 10 |
| 2025 | 7 | 5 |
| 2026 | 7 | 2 |
By publication year. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Hybrid structure for a surface acoustic wave device6 Oct 2026US 12,757,634 B2Soitec
- Acoustic wave device11 Aug 2026US 12,706,587 B2Murata Manufacturing Co., Ltd.
- Bulk acoustic wave resonators having convex surfaces, and methods of forming the same16 Jun 2026US 12,658,875 B2Texas Instruments Incorporated
- Acoustic wave device9 Jun 2026US 12,652,015 B2Murata Manufacturing Co., Ltd.
- Complementary switchable dual-mode bulk acoustic wave resonator and filter5 May 2026US 12,620,960 B2University of Florida Research Foundation, Inc.
- Bulk acoustic wave filter20 Aug 2026US 2026/0246439 A1STMicroelectronics International N. V.
- Bulk acoustic wave filter22 Jan 2026US 2026/0025124 A1STMicroelectronics International N. V.
- Semiconductor device and manufacturing method thereof, chip, and electronic device18 Dec 2025US 2025/0386563 A1Huawei Technologies Co., Ltd.
- Silicon-supported wafer to wafer solder bond23 Oct 2025US 2025/0330149 A1Skyworks Solutions, Inc.
- Method of manufacturing vibrator element, vibrator element, and vibrator13 Mar 2025US 2025/0088171 A1Seiko Epson Corporation
Most cited
By later US patents
- Piezoelectric laterally vibrating resonator structure geometries for spurious frequency suppression200US 8,816,567 B2QUALCOMM MEMS Technologies, Inc. · 2014
- Film bulk acoustic resonator fabrication method63US 11,146,238 B2Resonant Inc. · 2021
- Filter using piezoelectric film bonded to high resistivity silicon substrate with trap-rich layer55US 11,323,089 B2Resonant Inc. · 2022
- Bulk acoustic wave filter with a roughened substrate bottom surface and method of fabricating same30US 6,943,647 B2Infineon Technologies AG · 2005
- Bulk acoustic wave resonator having piezoelectric layer with multiple dopants29US 9,136,819 B2Avago Technologies General IP (Singapore) Pte. Ltd. · 2015