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US 12,620,960 B2Granted
Complementary switchable dual-mode bulk acoustic wave resonator and filter
AssigneeUniversity of Florida Research Foundation, Inc.
InventorsRoozbeh Tabrizian, Dicheng Mo, Shaurya Dabas, Sushant Rassay
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Abstract
A laminated ScxAl1-xN BAW resonator with complementary-switchable operation in thickness extensional modes (TEl and TEN). The resonator comprises ferroelectric ScxAl1-xN layers alternatively stacked with metal electrodes, enabling independent polarization switching of each piezoelectric layer. Opting for unanimous or alternative poling of the ScxAl1-xN layers, the resonator can be switched to operate in two complementary states with either TEl or TEN active resonance modes of similarly large kt2.
Claims19
A bulk acoustic wave resonator comprising:
- a silicon substrate;
- an aluminum nitride (AlN) layer deposited on the silicon substrate;
- and
- a stack comprising a plurality of ferroelectric scandium-aluminum nitride (ScAlN) layers that are alternatively stacked between a plurality of molybdenum (Mo) electrode layers, wherein the plurality of ScAlN layers comprise independent switchability of polarization.
1 more element
Dependencies are inferred from the claim text.