Hybrid structure for a surface acoustic wave device
AssigneeSoitec
InventorsOleg Kononchuk, Eric Butaud, Eric Desbonnets
Life of this patent
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Abstract
The disclosure relates to a hybrid structure for a surface-acoustic-wave device comprising a useful layer of piezoelectric material joined to a carrier substrate having a thermal expansion coefficient lower than that of the useful layer; the hybrid structure comprising an intermediate layer located between the useful layer and the carrier substrate, the intermediate layer being a structured layer formed from at least two different materials comprising a plurality of periodic motifs in the plane of the intermediate layer.
Claims20
A hybrid structure for a surface acoustic wave device, comprising:
- a carrier substrate;
- a useful layer of piezoelectric material joined to the carrier substrate, the useful layer having a thermal expansion coefficient higher than that of the carrier substrate;
- and
- an intermediate layer between the useful layer and the carrier substrate, the intermediate layer comprising a structured layer having a plurality of periodic motifs in a plane of the intermediate layer, a periodicity of the plurality of periodic motifs corresponding with an operation frequency of surface acoustic waves of the surface acoustic wave device.
A hybrid structure for a surface acoustic wave device, comprising:
- a carrier substrate;
- a useful layer of piezoelectric material joined to the carrier substrate;
- and
- an intermediate layer between the useful layer and the carrier substrate, the intermediate layer comprising first motifs and second motifs alternately and periodically formed in the intermediate layer, at least one lateral dimension of the first motifs and the second motifs is smaller than a wavelength of an acoustic signal used by the surface acoustic wave device.
A hybrid structure for a surface acoustic wave device,
- a carrier substrate;
- a useful layer of piezoelectric material joined to the carrier substrate;
- and
- an intermediate layer between the useful layer and the carrier substrate, the intermediate layer comprising first motifs and second motifs alternately and periodically formed in the intermediate layer, a thickness of the intermediate layer being greater than a wavelength of an acoustic signal used by the surface acoustic wave device.
Dependencies are inferred from the claim text.