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US 12,658,875 B2Granted
Bulk acoustic wave resonators having convex surfaces, and methods of forming the same
AssigneeTexas Instruments Incorporated
InventorTing-Ta Yen
Life of this patent
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Abstract
In one example, an apparatus comprises an acoustic resonator, the acoustic resonator including: an electrode; and a piezoelectric layer on the electrode, in which the electrode covers entirely a surface of the piezoelectric layer, and the piezoelectric layer has a convex portion with a non-uniform thickness.
Claims20
An apparatus comprising:
- an acoustic resonator including:
- an electrode;
- and
- a piezoelectric layer on the electrode, in which the electrode covers entirely a surface of the piezoelectric layer, and the piezoelectric layer has a convex portion with a non-uniform thickness.
1 more element
An integrated circuit (IC) comprising:
- an acoustic resonator including:
- an electrode;
- and
- a piezoelectric layer on the electrode, in which the electrode covers entirely a surface of the piezoelectric layer, and the piezoelectric layer has a convex portion with a non-uniform thickness.
1 more element
Dependencies are inferred from the claim text.