Acoustic wave device
AssigneeMurata Manufacturing Co., Ltd.
InventorsSho Nagatomo, Minefumi Ouchi
Life of this patent
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Abstract
An acoustic wave device includes a piezoelectric layer made of one of lithium niobate or lithium tantalate and including first and second main surfaces, and first and second electrode fingers on the first main surface of the piezoelectric layer. The first and second electrode fingers are adjacent electrodes. When a center thickness of the piezoelectric layer in a region between the first and second electrode fingers is denoted by tp1, and a center-to-center distance between the first and second electrode fingers is denoted by p, tp1/p is about 0.5 or less. When a thickness of the piezoelectric layer in a region where the first electrode finger is located is denoted by tp2, tp1>tp2.
Claims19
An acoustic wave device comprising:
- a piezoelectric layer made of one of lithium niobate or lithium tantalate and including first and second main surfaces;
- and
- first and second electrodes on the first main surface of the piezoelectric layer;
- wherein
- the first electrode and the second electrode are adjacent electrodes;
- when a center thickness of the piezoelectric layer in a region between the first electrode and the second electrode is denoted by tp1, and a center-to-center distance between the first electrode and the second electrode is denoted by p, tp1/p is about 0.5 or less;
- when a thickness of the piezoelectric layer in a region where the first electrode is located is denoted by tp2, tp1>tp2;
- and
- when a density of the piezoelectric layer is denoted by ρp, a density of the first electrode is denoted by ρm, a thickness of the first electrode is denoted by tm, an acoustic velocity of a transversal bulk wave propagating in the piezoelectric layer is denoted by vps, and an acoustic velocity of a transversal bulk wave propagating in the first electrode is denoted by vms, Formula (1) below is satisfied:
- t
- p
-
- 2
- t
- p
-
- 1
- ≥
- arctan
-
- (
- -
- ρ
- p
-
- v
- ps
- ρ
- m
-
- v
- ms
-
- tan
-
- (
- t
- m
-
- v
- ps
- t
- p
-
- 1
-
- v
- ms
-
- π
- )
- )
- π
- .
- Formula
-
- (
- 1
- )
An acoustic wave device comprising:
- a piezoelectric layer made of one of lithium niobate or lithium tantalate and including first and second main surfaces;
- first and second electrodes on the first main surface of the piezoelectric layer;
- and
- a dielectric film in a region of the first main surface of the piezoelectric layer in which no first or second electrode is provided, the dielectric film extending in a lengthwise direction of the first and second electrodes;
- wherein
- the first electrode and the second electrode are adjacent electrodes;
- when a center thickness of the piezoelectric layer in a region between the first electrode and the second electrode is denoted by tp1, and a center-to-center distance between the first electrode and the second electrode is denoted by p, tp1/p is about 0.5 or less;
- when a thickness of the piezoelectric layer in a region where at least one of the first electrode and the dielectric film is located is denoted by tp3, tp1>tp3;
- and
- when a density of the piezoelectric layer is denoted by ρp, a density of the first electrode is denoted by ρm, a thickness of the first electrode is denoted by tm, an acoustic velocity of a transversal bulk wave propagating in the piezoelectric layer is denoted by vps, and an acoustic velocity of a transversal bulk wave propagating in the first electrode is denoted by vms, Formula (1) below is satisfied:
- t
- p
-
- 2
- t
- p
-
- 1
- ≥
- arctan
-
- (
- -
- ρ
- p
-
- v
- ps
- ρ
- m
-
- v
- ms
-
- tan
-
- (
- t
- m
-
- v
- ps
- t
- p
-
- 1
-
- v
- ms
-
- π
- )
- )
- π
- .
- Formula
-
- (
- 1
- )
An acoustic wave device comprising:
- a piezoelectric layer made of one of lithium niobate or lithium tantalate and including first and second main surfaces;
- first and second electrodes on the first main surface of the piezoelectric layer;
- and
- a dielectric film in a region of the first main surface of the piezoelectric layer in which no first or second electrode is provided, the dielectric film extending in a lengthwise direction of the first and second electrodes;
- wherein
- the first electrode and the second electrode are adjacent electrodes;
- when a center thickness of the piezoelectric layer in a region between the first electrode and the second electrode is denoted by tp1, and a center-to-center distance between the first electrode and the second electrode is denoted by p, tp1/p is about 0.5 or less;
- when a thickness of the piezoelectric layer in a region where at least one of the first electrode and the dielectric film is located is denoted by tp3, tp1>tp3;
- the first main surface of the piezoelectric layer includes at least one recess;
- the first electrode is in any one of the at least one recess;
- and
- a width of the first electrode is less than a width of the at least one recess such that a portion of a side wall of the at least one recess is spaced apart from the first electrode.
Dependencies are inferred from the claim text.