H01S 3/104
In gas lasers
Official title: in gas lasers
H01S3/104 (In gas lasers) appears on 226 US grants and 231 published applications in this corpus.
Search patents in H01S- Granted patents
- 226
- Published applications
- 231
- Assignees
- 69
- Inventors
- 437
- Latest grant
- 7 Apr 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 1 | 0 |
| 1977 | 1 | 0 |
| 1978 | 2 | 0 |
| 1979 | 2 | 0 |
| 1980 | 1 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 0 | 0 |
| 1984 | 2 | 0 |
| 1985 | 3 | 0 |
| 1986 | 3 | 0 |
| 1987 | 0 | 0 |
| 1988 | 1 | 0 |
| 1989 | 3 | 0 |
| 1990 | 0 | 0 |
| 1991 | 2 | 0 |
| 1992 | 6 | 0 |
| 1993 | 2 | 0 |
| 1994 | 3 | 0 |
| 1995 | 0 | 0 |
| 1996 | 1 | 0 |
| 1997 | 0 | 0 |
| 1998 | 3 | 0 |
| 1999 | 2 | 0 |
| 2000 | 2 | 0 |
| 2001 | 1 | 1 |
| 2002 | 4 | 21 |
| 2003 | 12 | 6 |
| 2004 | 12 | 11 |
| 2005 | 8 | 9 |
| 2006 | 9 | 6 |
| 2007 | 6 | 5 |
| 2008 | 3 | 3 |
| 2009 | 3 | 2 |
| 2010 | 6 | 5 |
| 2011 | 1 | 3 |
| 2012 | 0 | 6 |
| 2013 | 7 | 6 |
| 2014 | 4 | 7 |
| 2015 | 9 | 12 |
| 2016 | 17 | 17 |
| 2017 | 21 | 17 |
| 2018 | 10 | 15 |
| 2019 | 8 | 15 |
| 2020 | 3 | 10 |
| 2021 | 11 | 10 |
| 2022 | 4 | 10 |
| 2023 | 7 | 10 |
| 2024 | 7 | 7 |
| 2025 | 9 | 7 |
| 2026 | 4 | 10 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Packed-bed filter for metal fluoride dust trapping in laser discharge chambers7 Apr 2026US 12,597,753 B2Cymer, Inc.
- Apparatus for and method of generating multiple laser beams24 Mar 2026US 12,586,978 B2Cymer, Inc.
- Gaseous laser systems with edge-defining element and related techniques10 Feb 2026US 12,548,968 B2Xemed LLC
- Predictive calibration scheduling apparatus and method3 Feb 2026US 12,540,850 B2Cymer, Inc.
- Line narrowing gas laser device, wavelength control method, and electronic device manufacturing method7 Oct 2025US 12,438,333 B2Gigaphoton Inc.
- Excimer laser apparatus and electronic device manufacturing method30 Jul 2026US 2026/0221711 A1Gigaphoton Inc.
- Laser maintenance apparatus and method16 Jul 2026US 2026/0203376 A1Cymer, Inc.
- Laser chamber, laser device, and electronic device manufacturing method16 Jul 2026US 2026/0204859 A1Gigaphoton Inc.
- Gas laser device and electronic device manufacturing method9 Jul 2026US 2026/0196790 A1Gigaphoton Inc.
- Gas laser device and electronic device manufacturing method9 Jul 2026US 2026/0196791 A1Gigaphoton Inc.
Most cited
By later US patents
- Very narrow band, two chamber, high rep rate gas discharge laser system144US 6,567,450 B2Cymer, Inc. · 2003
- Very narrow band, two chamber, high rep rate gas discharge laser system136US 6,625,191 B2Cymer, Inc. · 2003
- Method and system for controlling narrow-band oscillation excimer laser104US 5,142,543 AKabushiki Kaisha Komatsu Seisakusho · 1992
- Extreme repetition rate gas discharge laser with improved blower motor101US 6,477,193 B2Cymer, Inc. · 2002
- Laser spectral engineering for lithographic process80US 6,671,294 B2Cymer, Inc. · 2003