Laser maintenance apparatus and method
AssigneeCymer, Inc.
InventorsJames Michael Simonelli, Matthew Minakais, Nathan Gibson Wells, Christopher James Stevens
Life of this patent
Estimating the term…
Loading patent…
AssigneeCymer, Inc.
InventorsJames Michael Simonelli, Matthew Minakais, Nathan Gibson Wells, Christopher James Stevens
Estimating the term…
Disclosed is an apparatus and method in which one or more trained classifiers are used to determine whether to perform an automated containment action and, if an automated containment action is to be performed, which automated containment action is to be performed with less invasive automated containment actions being performed first and more invasive automated containment actions subsequently being performed only of the less invasive automated containment actions are ineffective. Also disclosed is an apparatus and method in which a first data type is used to train a first classifier which is then used to obtain a first classification and then the first classification is used to train a second classifier to classify a second data type.
A method of maintaining a laser system, the method comprising:
A method of maintaining a laser system, the method comprising:
A method of maintaining a laser system, the method comprising:
An apparatus for maintaining a laser system, the apparatus comprising:
An apparatus for maintaining a laser system, the apparatus comprising:
(canceled)
Dependencies are inferred from the claim text.