H01J 37/244
Detectors
Official title: Detectors; Associated components or circuits therefor
H01J37/244 (Detectors) appears on 1,985 US grants and 2,157 published applications in this corpus.
Search patents in H01J- Granted patents
- 1,985
- Published applications
- 2,157
- Assignees
- 459
- Inventors
- 3,432
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 3 | 0 |
| 1977 | 3 | 0 |
| 1978 | 6 | 0 |
| 1979 | 5 | 0 |
| 1980 | 3 | 0 |
| 1981 | 1 | 0 |
| 1982 | 1 | 0 |
| 1983 | 3 | 0 |
| 1984 | 6 | 0 |
| 1985 | 3 | 0 |
| 1986 | 4 | 0 |
| 1987 | 7 | 0 |
| 1988 | 9 | 0 |
| 1989 | 11 | 0 |
| 1990 | 8 | 0 |
| 1991 | 9 | 0 |
| 1992 | 9 | 0 |
| 1993 | 6 | 0 |
| 1994 | 9 | 0 |
| 1995 | 18 | 0 |
| 1996 | 9 | 0 |
| 1997 | 6 | 0 |
| 1998 | 13 | 0 |
| 1999 | 10 | 0 |
| 2000 | 9 | 0 |
| 2001 | 12 | 4 |
| 2002 | 13 | 30 |
| 2003 | 27 | 25 |
| 2004 | 25 | 31 |
| 2005 | 20 | 20 |
| 2006 | 39 | 57 |
| 2007 | 32 | 34 |
| 2008 | 48 | 70 |
| 2009 | 40 | 50 |
| 2010 | 44 | 40 |
| 2011 | 47 | 55 |
| 2012 | 40 | 60 |
| 2013 | 66 | 68 |
| 2014 | 72 | 69 |
| 2015 | 69 | 107 |
| 2016 | 90 | 97 |
| 2017 | 109 | 121 |
| 2018 | 93 | 94 |
| 2019 | 112 | 141 |
| 2020 | 140 | 161 |
| 2021 | 140 | 158 |
| 2022 | 143 | 140 |
| 2023 | 114 | 151 |
| 2024 | 72 | 130 |
| 2025 | 115 | 145 |
| 2026 | 92 | 99 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Pixel elements, particle beam microscopes including the same, and associated methods6 Oct 2026US 12,755,927 B2FEI Company
- Operation methods of 2D pixelated detector for an apparatus with plural charged-particle beams and mapping surface potentials6 Oct 2026US 12,755,928 B2ASML Netherlands B. V.
- E-beam exposure method and mask manufacturing method comprising the same6 Oct 2026US 12,755,931 B2Samsung Electronics Co., Ltd.
- Electron beam spot shape reconstruction unit29 Sep 2026US 12,749,208 B2Applied Materials Israel Ltd.
- Method of characterizing a detection path of a charged particle beam and a charged particle mirror29 Sep 2026US 12,749,645 B2ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Charged particle beam devices and membrane assemblies useful therein8 Oct 2026US 2026/0311957 A1Airsem Technologies Ltd.
- Method for operating a particle beam apparatus, computer program product and particle beam apparatus for carrying out the method8 Oct 2026US 2026/0311958 A1Carl Zeiss Microscopy GmbH
- Systems and methods for subvoxel sem based volume electron microscopy8 Oct 2026US 2026/0311959 A1Yale University
- System and Method for Extending Faraday Setup Cup Life Time by Scanning Ion Beam during Setup1 Oct 2026US 2026/0302125 A1APPLIED Materials.Inc.
- Microchips for use in electron microscopes and related methods1 Oct 2026US 2026/0302128 A1Northwestern University
Most cited
By later US patents
- Radial waveguide systems and methods for post-match control of microwaves157US 9,299,537 B2APPLIED Materials.Inc. · 2016
- Radial waveguide systems and methods for post-match control of microwaves153US 9,299,538 B2APPLIED Materials.Inc. · 2016
- Radial waveguide systems and methods for post-match control of microwaves129US 9,564,296 B2APPLIED Materials.Inc. · 2017
- Method for inspecting substrate, substrate inspecting system and electron beam apparatus113US 7,109,483 B2Ebara Corporation · 2006
- Apparatus and methods for electron beam detection111US 8,692,204 B2KLA-Tencor Corporation · 2014