Pixel elements, particle beam microscopes including the same, and associated methods
AssigneeFEI Company
InventorGerrit Cornelis van Hoften
Life of this patent
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AssigneeFEI Company
InventorGerrit Cornelis van Hoften
Estimating the term…
Pixel elements and associated methods are disclosed herein. A pixel element can comprise a radiation-sensitive element configured to generate an electric charge, a floating diffusion node, a charge storage device, and an output stage configured to generate a charge signal. The pixel element is configured to operate in a high-gain mode and a low-gain mode and can have a total dynamic range that is at least 100,000:1. A method of operating a pixel element can comprise reading out a high-gain charge signal with the pixel element in a high-gain mode and reading out a low-gain charge signal with the pixel element in a low-gain mode. The reading out the low-gain charge signal comprises configuring a low-gain channel charge capacity of the pixel element such that a ratio of the low-gain channel charge capacity to a high-gain channel charge capacity is at least 30:1.
A pixel element comprising:
An apparatus, comprising:
A computer-readable medium comprising stored processor-executable instructions that, when executed by a processor, cause the processor to:
Dependencies are inferred from the claim text.