H01J 2237/2826
Calibration
H01J2237/2826 (Calibration) appears on 254 US grants and 274 published applications in this corpus.
Search patents in H01J- Granted patents
- 254
- Published applications
- 274
- Assignees
- 87
- Inventors
- 627
- Latest grant
- 29 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1992 | 1 | 0 |
| 1993 | 0 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 2 | 0 |
| 1999 | 1 | 0 |
| 2000 | 2 | 0 |
| 2001 | 2 | 1 |
| 2002 | 2 | 1 |
| 2003 | 9 | 9 |
| 2004 | 11 | 9 |
| 2005 | 8 | 10 |
| 2006 | 9 | 15 |
| 2007 | 7 | 9 |
| 2008 | 19 | 15 |
| 2009 | 7 | 8 |
| 2010 | 7 | 7 |
| 2011 | 10 | 9 |
| 2012 | 10 | 2 |
| 2013 | 7 | 14 |
| 2014 | 12 | 8 |
| 2015 | 8 | 4 |
| 2016 | 6 | 11 |
| 2017 | 14 | 13 |
| 2018 | 11 | 10 |
| 2019 | 8 | 12 |
| 2020 | 18 | 19 |
| 2021 | 12 | 11 |
| 2022 | 11 | 16 |
| 2023 | 15 | 18 |
| 2024 | 7 | 11 |
| 2025 | 11 | 19 |
| 2026 | 7 | 13 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Method of characterizing a detection path of a charged particle beam and a charged particle mirror29 Sep 2026US 12,749,645 B2ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Charged particle beam device, charged particle beam system, and adjustment method18 Aug 2026US 12,712,148 B2Hitachi High-Tech Corporation
- Automatic electron beam calibration on periodic nanostructures28 Apr 2026US 12,614,693 B2Snap Inc.
- Charged particle microscope for examining a specimen, and method of determining an aberration of said charged particle microscope21 Apr 2026US 12,609,270 B2FEI Company
- Multi-beam charged particle system and method of controlling the working distance in a multi-beam charged particle system21 Apr 2026US 12,609,282 B2Carl Zeiss MultiSEM GmbH
- System and method for image disturbance compensation3 Sep 2026US 2026/0260840 A1ASML Netherlands B. V.
- Method of configuring a charged particle beam system and charged particle beam system13 Aug 2026US 2026/0237599 A1ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Automatic electron beam calibration on periodic nanostructures23 Jul 2026US 2026/0213121 A1Snap Inc.
- Astigmatism correction method of electron beam imaging device, product and apparatus2 Jul 2026US 2026/0188606 A1Dongfang Jingyuan Electron Limited
- Augmenting sem imaging output2 Jul 2026US 2026/0188608 A1Applied Materials Israel Ltd.
Most cited
By later US patents
- Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus74US 6,107,637 AHitachi, Ltd. · 2000
- Scanning particle beam instrument48US 7,348,557 B2Carl Zeiss SMT GmbH · 2008
- Charged particle beam scanning method and charged particle beam apparatus46US 7,598,497 B2Hitachi High-Technologies Corporation · 2009
- Automated adjustment of an energy filtering transmission electron microscope41US 5,798,524 AGatan, Inc. · 1998
- Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus34US 7,692,144 B2Hitachi, Ltd. · 2010