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AssigneeApplied Materials Israel Ltd.
InventorsOmri Brand, Ilan Ben-Harush, Erez Lidor, David Uliel, Sharon Farkash Rainer, Ravid Aber
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The disclosed subject matter relates to a computer system and a computer-implemented method for enhancing Scanning Electron Microscope (SEM) imaging output by mitigating and correcting imaging degradation due to charging distortion effects. The methods and systems presented address artifacts caused by charging distortions, improving the accuracy and reliability of SEM imaging for high-precision semiconductor applications. The solution enables rapid, efficient correction, and can be applied during runtime, such as within a semiconductor SEM scanning sequence, to generate augmented SEM images that facilitate more accurate analysis.
A computer-implemented method for rectifying charging distortions in a set of Scanning Electron Microscope (SEM) output frames of a semiconductor specimen, the method comprising:
A computer system for rectifying charging distortions in Scanning Electron Microscope (SEM) output frames of a semiconductor specimen, the system comprising:
A non-transitory computer-readable medium comprising instructions that, when executed by a computer, cause the computer to perform a method of rectifying charging distortions in a set of Scanning Electron Microscope (SEM) output frames of a semiconductor specimen, the method comprising:
Dependencies are inferred from the claim text.