System and method for image disturbance compensation
AssigneeASML Netherlands B.V.
InventorsYing LUO, Zhonghua DONG
Life of this patent
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Abstract
Systems, apparatuses, and methods include a generating a reference signal based on a power input for an imaging system; generating a scan signal indicating a scan of a sample; extracting, from an image generated from the scan, first and second disturbance data; generating a calibrated frequency, magnitude, and phase of the image disturbance using the extracted first and second disturbance data, the reference signal, and the scan signal; combining the calibrated frequency, magnitude, and phase of the image disturbance and the reference signal to generate a compensation signal; and using the compensation signal to control a plurality of deflection drivers used for manipulating charged particles to scan the sample.
Claims20
A non-transitory computer readable medium including a set of instructions that is executable by one or more processors of an apparatus to cause the apparatus to perform a method comprising:
- generating a reference signal based on a power input for an imaging system;
- generating a scan signal indicating a scan of a sample;
- extracting, from an image generated from the scan, first and second disturbance data;
- generating a calibrated frequency, magnitude, and phase of image disturbance using the extracted first and second disturbance data, the reference signal, and the scan signal;
- combining the calibrated frequency, magnitude, and phase of the image disturbance and the reference signal to generate a compensation signal;
- and
- using the compensation signal to control a plurality of deflection drivers used for manipulating charged particles to scan the sample.
A system comprising:
- one or more processors configured to execute instructions to cause the system to perform:
- generate a reference signal based on a power input for an imaging system;
- generate a scan signal indicating a scan of a sample;
- extract, from an image generated from the scan, first and second disturbance data;
- generate a calibrated frequency, magnitude, and phase of image disturbance using the extracted first and second disturbance data, the reference signal, and the scan signal;
- combine the calibrated frequency, magnitude, and phase of the image disturbance and the reference signal to generate a compensation signal;
- and
- use the compensation signal to control a plurality of deflection drivers used for manipulating charged particles to scan the sample.
A non-transitory computer readable medium including a set of instructions that is executable by one or more processors of an apparatus to cause the apparatus to perform a method comprising:
- generating a reference signal based on a power input for an imaging system;
- generating a scan signal indicating a scan of a sample;
- extracting, from an image generated from the scan, a frequency profile of an image disturbance;
- generating a calibrated signal based on the reference signal and the extracted frequency profile;
- generating a compensation signal using the calibrated signal and the reference signal;
- transforming image coordinates associated with the compensation signal into deflection driver coordinates;
- and
- using the deflection driver coordinates of the compensation signal to control a plurality of deflection drivers used for manipulating charged particles to scan the sample.
Dependencies are inferred from the claim text.