H01J 2237/2583
Using tunnel effects
Official title: using tunnel effects, e.g. STM, AFM
H01J2237/2583 (Using tunnel effects) appears on 23 US grants and 20 published applications in this corpus.
Search patents in H01J- Granted patents
- 23
- Published applications
- 20
- Assignees
- 20
- Inventors
- 61
- Latest grant
- 10 Feb 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1986 | 1 | 0 |
| 1987 | 0 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 0 | 0 |
| 1993 | 1 | 0 |
| 1994 | 1 | 0 |
| 1995 | 0 | 0 |
| 1996 | 2 | 0 |
| 1997 | 1 | 0 |
| 1998 | 0 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 0 | 0 |
| 2002 | 0 | 0 |
| 2003 | 0 | 0 |
| 2004 | 0 | 1 |
| 2005 | 0 | 1 |
| 2006 | 0 | 0 |
| 2007 | 0 | 0 |
| 2008 | 1 | 2 |
| 2009 | 0 | 0 |
| 2010 | 2 | 0 |
| 2011 | 1 | 1 |
| 2012 | 0 | 1 |
| 2013 | 0 | 0 |
| 2014 | 0 | 0 |
| 2015 | 1 | 4 |
| 2016 | 1 | 0 |
| 2017 | 0 | 1 |
| 2018 | 1 | 1 |
| 2019 | 0 | 0 |
| 2020 | 1 | 2 |
| 2021 | 2 | 3 |
| 2022 | 2 | 2 |
| 2023 | 2 | 0 |
| 2024 | 2 | 1 |
| 2025 | 0 | 0 |
| 2026 | 1 | 0 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- In-line depth measurements by AFM10 Feb 2026US 12,548,734 B2Applied Materials Israel Ltd.
- Method for electrically examining electronic components of an integrated circuit11 Jun 2024US 12,007,408 B2Forschungszentrum Juelich GmbH
- Mask defect repair apparatus and mask defect repair method20 Feb 2024US 11,906,899 B2Hitachi High-Tech Science Corporation
- Device and method for analyzing a defect of a photolithographic mask or of a wafer22 Aug 2023US 11,733,186 B2Carl Zeiss SMT GmbH
- Apparatus and method for examining and/or processing a sample28 Feb 2023US 11,592,461 B2Carl Zeiss SMT GmbH
- In-line depth measurements by afm27 Jun 2024US 2024/0212976 A1Applied Materials Israel Ltd.
- Method for electrically examining electronic components of an integrated circuit4 Aug 2022US 2022/0244290 A1Forschungszentrum Juelich GmbH
- Apparatus and method for examining and/or processing a sample9 Jun 2022US 2022/0178965 A1Carl Zeiss SMT GmbH
- Device and method for analysing a defect of a photolithographic mask or of a wafer12 Aug 2021US 2021/0247336 A1Carl Zeiss SMT GmbH
- A method for sem-guided afm scan with dynamically varied scan speed29 Apr 2021US 2021/0125809 A1Jiangsu Jitri Micro-Nano Automation Institute Co., Ltd.
Most cited
By later US patents
- Low-energy scanning transmission electron microscope58US 4,618,767 AInternational Business Machines Corporation · 1986
- System for analyzing surfaces of samples47US 5,619,035 ABiotechnology Research and Development Corporation · 1997
- System for analyzing surfaces of samples43US 5,504,366 ABiotechnology Research and Development Corporation · 1996
- Small cavity analytical instruments41US 5,559,328 ABiotechnology Research and Development Corporation · 1996
- System for detecting threshold phenomena associated with and/or atomic or molecular spectra of a substance24US 5,268,573 APenn State Research Foundation and Biotechnology Research · 1993