Method for electrically examining electronic components of an integrated circuit

Method for electrically examining electronic components of an integrated circuit (1), comprising a target region (3) which is to be examined and in which electronic components with contact points (5) are located, and a remaining region referred to as non-target region (2),

• characterized in that
• an examination is performed with a combined SEM/AFM nanoprobe, wherein at least a portion of the non-target region (2) is imaged with the scanning electron microscope part of the SEM/AFM nanoprobe in a first step, and at least a portion of the target region (3) is imaged only with the atomic force microscope part of the SEM/AFM nanoprobe in a subsequent step;
• and in a further subsequent step, current/voltage curves are recorded as characteristic electrical curves at the contact points with the nanoprobe, or a conductive AFM technique is performed.