A method for sem-guided afm scan with dynamically varied scan speed
AssigneeJiangsu Jitri Micro-Nano Automation Institute Co., Ltd.
InventorsYu SUN, Jun CHEN, Ko Lun CHEN, Tiancong WANG
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Abstract
A method discloses topography information extracted from scanning electron microscope (SEM) images to determine the atomic force microscope (AFM) image scanning speed at each sampling point or in each region on a sample. The method includes the processing of SEM images to extract possible topography features and create a feature metric map (step 1), the conversion of the feature metric map into AFM scan speed map (step 2), and performing AFM scan according to the scan speed map (step 3). The method enables AFM scan with higher scan speeds in areas with less topography feature, and lower scan speeds in areas that are rich in topography features.
Claims13
A method of varying scan speed of atomic force microscopy (AFM) imaging at each sampling point based on prior topography information extracted from a scanning electron microscopy (SEM) image, comprising:
- (a) A method for producing a feature metric map based on image processing algorithms for identifying and locating topography features from the SEM image;
- (b) A method for converting the feature metric map into an AFM scan speed map;
- (c) A method for setting scan speed for each sampling point, based on the scan speed map, to use a high scan speed for locations on the sample with minimal topography feature, and use a low scan speed for locations on the sample with rich topography features.
A system for atomic force microscopy (AFM) imaging inside a scanning electron microscopy (SEM), comprising:
- (a) An atomic force microscope (AFM) installed inside a scanning electron microscope (SEM);
- (b) A host computer, which extracts topography information from SEM image to generate a speed map for AFM scanning process;
- (c) An AFM controller, which controls scan speed of AFM using the information from the speed map, the AFM controller being connected through wire connection to the host computer;
- (d) An AFM carrier, which scans a sample with dynamically varied speeds based on a control signal from the AFM controller, the AFM carrier being connected through wire connection to the AFM controller.
Dependencies are inferred from the claim text.