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US 2022/0178965 A1Published application
Apparatus and method for examining and/or processing a sample
AssigneeCarl Zeiss SMT GmbH
InventorsChristof Baur, Michael Budach
Life of this patent
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Abstract
The present invention relates to an apparatus for examining and/or processing a sample, said apparatus comprising: (a) a scanning particle microscope for providing a beam of charged particles, which can be directed on a surface of the sample; and (b) a scanning probe microscope with a deflectable probe; (c) wherein a detection structure is attached to the deflectable probe.
Claims20
An apparatus for examining and/or processing a sample, the apparatus comprising:
- a. scanning particle microscope for providing a beam of charged particles, which can be directed on a surface of the sample;
- and
- b. scanning probe microscope with a deflectable probe and a light pointer system for detecting a deflection of the probe;
- c. wherein the light pointer system is guided at least in part in a column of the scanning particle microscope.
1 more element
A method for moving a particle on a photolithographic sample, including the following steps:
- a. positioning a probe that is movable relative to the sample in the vicinity of the particle to be moved;
- b. using a charged particle beam of a scanning particle microscope, a light pointer system, which is at least partly guided in the scanning particle microscope, or a light pointer system, which comprises a reflection structure arranged on a probe, said reflection structure being arranged at an angle that differs from zero on a surface of the probe, for the purposes of determining a deflection of the probe during the positioning;
- and
- c. moving the particle by moving the probe relative to the sample.
1 more element
Dependencies are inferred from the claim text.