H01J 2237/1526
For x-y scanning
Official title: For X-Y scanning
H01J2237/1526 (For x-y scanning) appears on 33 US grants and 34 published applications in this corpus.
Search patents in H01J- Granted patents
- 33
- Published applications
- 34
- Assignees
- 32
- Inventors
- 98
- Latest grant
- 24 Feb 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1991 | 1 | 0 |
| 1992 | 1 | 0 |
| 1993 | 0 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 1 | 0 |
| 1997 | 0 | 0 |
| 1998 | 1 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 0 | 0 |
| 2002 | 0 | 0 |
| 2003 | 0 | 1 |
| 2004 | 1 | 0 |
| 2005 | 0 | 1 |
| 2006 | 1 | 3 |
| 2007 | 1 | 0 |
| 2008 | 1 | 5 |
| 2009 | 2 | 0 |
| 2010 | 3 | 1 |
| 2011 | 1 | 2 |
| 2012 | 2 | 0 |
| 2013 | 1 | 1 |
| 2014 | 1 | 3 |
| 2015 | 2 | 2 |
| 2016 | 2 | 3 |
| 2017 | 1 | 1 |
| 2018 | 1 | 1 |
| 2019 | 3 | 3 |
| 2020 | 1 | 3 |
| 2021 | 2 | 0 |
| 2022 | 1 | 0 |
| 2023 | 0 | 0 |
| 2024 | 0 | 1 |
| 2025 | 1 | 2 |
| 2026 | 1 | 1 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Method of determining an energy spectrum or energy width of a charged particle beam, and charged particle beam imaging device24 Feb 2026US 12,562,338 B2ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Electron gun and system and method using electron gun25 Feb 2025US 12,237,140 B1
- Deflector and charged particle beam system15 Feb 2022US 11,251,013 B2JEOL Ltd.
- Electron beam vaporizer and method for vaporizing a vaporization material by means of an electron beam28 Sep 2021US 11,133,154 B2Von Ardenne Asset GmbH & Co. KG
- Control method for multi-phase winding deflection scanning device16 Mar 2021US 10,950,411 B2
- Collation system28 May 2026US 2026/0148929 A1NEC Corporation
- Method and device for correcting image errors when scanning a charged particle beam over a sample29 May 2025US 2025/0174429 A1
- Electron gun and system and method using electron gun13 Feb 2025US 2025/0054720 A1
- Method of determining an energy spectrum or energy width of a charged particle beam, and charged particle beam imaging device7 Nov 2024US 2024/0371600 A1ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Deflector and Charged Particle Beam System30 Jul 2020US 2020/0243297 A1JEOL Ltd.
Most cited
By later US patents
- Electron beam apparatus and a device manufacturing method using the same apparatus17US 7,385,197 B2Ebara Corporation · 2008
- Ion implantation apparatus16US 5,751,002 ANihon Shinku Gijutsu Kabushiki Kaisha · 1998
- Thermally stable magnetic deflection assembly and method of making same14US 5,012,104 AEtec Systems, Inc. · 1991
- E-beam vision system for monitoring and control10US 7,479,632 B1Cyber Materials LLC · 2009
- Temperature stable magnetic deflection assembly8US 5,136,166 AEtec Systems, Inc. · 1992