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US 11,251,013 B2Granted
Deflector and charged particle beam system
AssigneeJEOL Ltd.
InventorYuji Kohno
Life of this patent
Estimating the term…
Abstract
There is provided a deflector that produces only a weak resulting combined hexapole field. The deflector (100) has first to sixth coils (11-16). The first to third coils (11-13) are equal in direction of energization. The fourth to sixth coils (14-16) are equal in direction of energization. The first coil (11) and fourth coil (14) are opposite in direction of energization. The first, third, fourth, and sixth coils (11, 13, 14, 16) are equal in electromotive force. The second coil (12) is equal in electromotive force to the fifth coil (15) and twice the electromotive force of the first coil (11).
Claims10
A charged particle beam deflector comprising:
- an annular core;
- a first coil wound with a width of 30 degrees around the core;
- a second coil wound with a width of 30 degrees around the core;
- a third coil wound with a width of 30 degrees around the core;
- a fourth coil wound with a width of 30 degrees around the core;
- a fifth coil wound with a width of 30 degrees around the core;
- a sixth coil wound with a width of 30 degrees around the core;
- and
- a first power supply electrically connected to the first coil, the second coil, the third coil, the fourth coil, the fifth coil and the sixth coil,
- wherein the first coil, the second coil, the third coil, the fourth coil, the fifth coil, and the sixth coil are arranged from first through sixth and at regular angular intervals such that the angular intervals between successive ones of the first through sixth coils including the interval between the sixth and first coils are equal to each other,
- wherein the first, second, and third coils are equal in direction of energization when supplied with electrical current from the first power supply,
- wherein the fourth, fifth, and sixth coils are equal in direction of energization when supplied with electrical current from the first power supply,
- wherein the first and fourth coils are mutually opposite in direction of energization when supplied with electrical current from the first power supply,
- wherein the first, third, fourth, and sixth coils are equal in electromotive force when supplied with electrical current from the first power supply,
- wherein the second and fifth coils are equal in electromotive force when supplied with electrical current from the first power supply,
- wherein the second coil is twice the electromotive force of the first coil when supplied with electrical current from the first power supply, and
- wherein a series combination of the first coil and the third coil, a series combination of the fourth coil and the sixth coil, and a series combination of the second coil and the fifth coil are connected in parallel to the first power supply.
14 more elements
A charged particle beam deflector comprising:
- an annular core;
- a first coil wound with a width of 30 degrees around the core;
- a second coil wound with a width of 30 degrees around the core;
- a third coil wound with a width of 30 degrees around the core;
- a fourth coil wound with a width of 30 degrees around the core;
- a fifth coil wound with a width of 30 degrees around the core;
- a sixth coil wound with a width of 30 degrees around the core;
- and
- a first power supply electrically connected to the first coil, the second coil, the third coil, the fourth coil, the fifth coil and the sixth coil,
- wherein the first coil, the second coil, the third coil, the fourth coil, the fifth coil, and the sixth coil are arranged from first through sixth and at regular angular intervals such that the angular intervals between successive ones of the first through sixth coils including the interval between the sixth and first coils are equal to each other,
- wherein the first, second, and third coils are equal in direction of energization when supplied with electrical current from the first power supply,
- wherein the fourth, fifth, and sixth coils are equal in direction of energization when supplied with electrical current from the first power supply,
- wherein the first and fourth coils are mutually opposite in direction of energization when supplied with electrical current from the first power supply,
- wherein the first, third, fourth, and sixth coils are equal in electromotive force when supplied with electrical current from the first power supply,
- wherein the second and fifth coils are equal in electromotive force when supplied with electrical current from the first power supply,
- wherein the second coil is twice the electromotive force of the first coil when supplied with electrical current from the first power supply, and wherein a series combination of the first coil, second coil, and third coil and a series combination of the fourth coil, fifth coil, and sixth coil are connected in parallel with the power supply.
13 more elements
Dependencies are inferred from the claim text.