Temperature stable magnetic deflection assembly
AssigneeEtec Systems, Inc.
InventorLydia J. Young
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Abstract
A thermally stable magnetic deflection assembly for use in an electron or particle beam machine with several separately potted magnetic coils spaced apart and arranged in a particular vertical position on a central pipe. Non metallic, low coefficient of thermal expansion, highly thermally conductive materials are used throughout and means are provided for maintaining the entire assembly at a desired temperature. Also disclosed is a method of making a thermally stable magnetic deflection assembly.
Claims10
For a beam column of a lithography machine, a thermally stable magnetic deflection assembly comprising:
- a plurality of magnetic coils each formed of conductors;
- and
- means for spacing apart and arranging the coils, said means being formed of non-metallic thermally stable material.
For a beam column of a lithography machine, a thermally stable magnetic deflection assembly comprising:
- a plurality of magnetic coils each wound on a form of non-metallic thermally stable material;
- each coil being surrounded by thermally conductive material;
- a pipe of non-metallic thermally stable material;
- said coils being stacked on said pipe;
- and
- means for vertically spacing each coil from each other.
Dependencies are inferred from the claim text.