Electron beam vaporizer and method for vaporizing a vaporization material by means of an electron beam
AssigneeVon Ardenne Asset GmbH & Co. KG
InventorCarsten Deus
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Abstract
According to various embodiments, a method for vaporizing a vaporization material by means of an electron beam may include the following: generating a first deflection pattern having a first power density at least on an end face of a rod-shaped vaporization material; and, subsequently, generating a second deflection pattern having a second power density on a portion of an outer edge of the rod-shaped vaporization material and a portion of an inner edge of a ring crucible, which encloses the rod-shaped vaporization material, wherein the second power density is greater than the first power density.
Claims20
An electron beam vaporizer for vaporizing a vaporization material, the electron beam vaporizer comprising:
- an electron beam source for generating an electron beam;
- an electron beam deflector for deflecting the electron beam;
- a ring crucible having a passage opening configured to receive a rod arranged at least partially in the passage opening, and the rod comprising the vaporization material, wherein an outer edge of the rod is adjacent to an inner edge of the ring crucible such that there is a gap between the inner edge of the ring crucible and the outer edge of the rod;
- and
- a controller configured to control the electron beam deflector to deflect the electron beam,
- wherein the controller is configured to control the electron beam deflector to alternately form a first deflection pattern and a second deflection pattern from the electron beam,
- wherein the first deflection pattern has a lower power density than the second deflection pattern,
- wherein the first deflection pattern is generated at least on the rod and the second deflection pattern is generated at least on a portion of the outer edge of the rod and on a portion of the inner edge of the ring crucible.
An electron beam vaporizer for vaporizing a vaporization material, the electron beam vaporizer comprising:
- an electron beam source for generating an electron beam;
- an electron beam deflector for deflecting the electron beam;
- a ring crucible having a passage opening configured to receive a rod arranged at least partially in the passage opening, and the rod comprising the vaporization material, wherein an outer edge of the rod is adjacent to an inner edge of the ring crucible such that there is a gap between the inner edge of the ring crucible and the outer edge of the rod;
- and
- a controller configured to control the electron beam deflector to deflect the electron beam,
- wherein the controller is configured to control the electron beam deflector to alternately provide a first irradiation pattern and a second irradiation pattern via the electron beam,
- wherein the first irradiation pattern has a lower power density than the second irradiation pattern,
- wherein the first irradiation pattern is generated at least on the rod and the second irradiation pattern is generated at least on a portion of the outer edge of the rod and on a portion of the inner edge of the ring crucible and the second irradiation pattern is configured to additionally clean the portion of the inner edge of the ring crucible.
An electron beam vaporizer for vaporizing a vaporization material, the electron beam vaporizer comprising:
- an electron beam source for generating an electron beam;
- an electron beam deflector for deflecting the electron beam;
- a ring crucible having a passage opening configured to receive a rod arranged at least partially in the passage opening, and the rod comprising the vaporization material, wherein an outer edge of the rod is adjacent to an inner edge of the ring crucible such that there is a gap between the inner edge of the ring crucible and the outer edge of the rod;
- and
- a controller configured to control the electron beam deflector to deflect the electron beam to alternately irradiate:
- according to a first irradiation pattern with a first power density, at least the rod, and according to a second irradiation pattern with a second power density, a region comprising at least a portion of the outer edge of the rod and a portion of the inner edge of the ring crucible;
- wherein the first power density differs from the second power density.
Dependencies are inferred from the claim text.