G05B 2219/32075
Predict workpiece measurements from measurements of previous workpieces
G05B2219/32075 (Predict workpiece measurements from measurements of previous workpieces) appears on 10 US grants and 8 published applications in this corpus.
Search patents in G05B- Granted patents
- 10
- Published applications
- 8
- Assignees
- 9
- Inventors
- 29
- Latest grant
- 10 Aug 2021
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|---|---|---|
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| 2006 | 1 | 1 |
| 2007 | 1 | 2 |
| 2008 | 0 | 0 |
| 2009 | 0 | 0 |
| 2010 | 2 | 1 |
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| 2012 | 0 | 0 |
| 2013 | 1 | 1 |
| 2014 | 1 | 0 |
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| 2018 | 0 | 1 |
| 2019 | 1 | 1 |
| 2020 | 0 | 1 |
| 2021 | 2 | 0 |
By publication year.
Recent patents
- Data management and mining to correlate wafer alignment, design, defect, process, tool, and metrology data10 Aug 2021US 11,088,039 B2APPLIED Materials.Inc.
- Inspection information prediction apparatus, inspection apparatus, and non-transitory computer readable medium storing inspection information prediction program6 Apr 2021US 10,969,770 B2Fuji Xerox Co., Ltd.
- Product quality prediction method for mass customization9 Jul 2019US 10,345,794 B2National Cheng Kung University
- Continuous prediction of expected chip performance throughout the production lifecycle29 Jul 2014US 8,793,106 B2International Business Machines Corporation
- Automated model building and batch model building for a manufacturing process, process monitoring, and fault detection23 Jul 2013US 8,494,798 B2MKS Instruments, Inc.
- Inspection information prediction apparatus, inspection apparatus, and non-transitory computer readable medium storing inspection information prediction program26 Mar 2020US 2020/0096979 A1Fuji Xerox Co., Ltd.
- Data management and mining to correlate wafer alignment, design, defect, process, tool, and metrology data25 Apr 2019US 2019/0122944 A1APPLIED Materials.Inc.
- Product quality prediction method for mass customization5 Jul 2018US 2018/0188717 A1National Cheng Kung University
- Continuous prediction of expected chip performance throuhout the production lifecycle28 Mar 2013US 2013/0080125 A1International Business Machines Corporation
- Automated model building and batch model building for a manufacturing process, process monitoring, and fault detection4 Mar 2010US 2010/0057237 A1MKS Instruments, Inc.
Most cited
By later US patents
- System and method for performing process visualization32US 7,010,364 B1The MathWorks, Inc. · 2006
- Process control based upon a metrology delay9US 6,834,213 B1Advanced Micro Devices, Inc. · 2004
- Automated model building and batch model building for a manufacturing process, process monitoring, and fault detection7US 8,494,798 B2MKS Instruments, Inc. · 2013
- Management system of semiconductor fabrication apparatus, abnormality factor extraction method of semiconductor fabrication apparatus, and management method of the same4US 7,742,834 B2Kabushiki Kaisha Toshiba · 2010
- System and method for performing process visualization2US 7,738,978 B2The MathWorks, Inc. · 2010