Automated model building and batch model building for a manufacturing process, process monitoring, and fault detection
AssigneeMKS Instruments, Inc.
InventorsNouna Kettaneh, Svante Bjarne Wold
Life of this patent
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Abstract
A method for creating a new model of a manufacturing process according to a multivariate analysis including selecting a set of data representative of multidimensional data measured during a step or phase of a manufacturing process. The method also includes determining a set of model generation conditions based on the set of data and generating the new model specifying intervals for the multidimensional data measured during a future manufacturing process based on the set of model generation conditions.
Claims19
A method for creating a new model of a manufacturing process according to a multivariate analysis, the method comprising:
- receiving, by a computing device, a plurality of sets of data, wherein the plurality of sets of data are multidimensional data measured during a step or phase of a manufacturing process for one or a plurality of wafers, and the step or phase is a process step from a plurality of process steps associated with manufacturing a wafer;
- determining, by the computing device, a set of model generation conditions based on a user input selection that indicates which data from the plurality of sets of data to include in generating a new model, wherein the user input selection includes a maturity variable that indicates a degree of completion of a batch;
- and
- generating, by the computing device, the new model based on the set of model generation conditions, wherein the new model is used for monitoring during a future manufacturing process.
An apparatus for generating data structures indicative of conditions of a manufacturing process or current quality of output of a manufacturing process, the apparatus comprising a processor and memory configured to:
- receive a plurality of sets of data, wherein the plurality of sets of data are multidimensional data measured during a step or phase of a manufacturing process for one or a plurality of wafers, and the step or phase is a process step from a plurality of process steps associated with manufacturing a wafer;
- determine a set of model generation conditions based on a user input selection that indicates which data from the plurality of sets of data to include in generating a new model, wherein the user input selection includes a maturity variable that indicates a degree of completion of a batch;
- and
- generate a new model based on the set of model generation conditions, wherein the new model is used for monitoring during a future manufacturing process.
A system for creating or updating a model according to a multivariate analysis, the system comprising:
- a user interface including:
- (a) a first window allowing a user to select a plurality of sets of data, wherein the plurality of sets of data are multidimensional data measured during a step or phase of a manufacturing process for one or a plurality of wafers, and the step or phase is a process step from a plurality of process steps associated with manufacturing a wafer, to be used to generate a new model;
- (b) a second window allowing a user to determine model generation specifications including data to be included in the generated model, data to be excluded from the generated model, and a maturity variable that indicates a degree of completion of a batch;
- and
- (c) an area for displaying the data to be used to generate the model;
- and
- a memory for storing the generated model, the generated model based on the set of model generation specifications, wherein the generated model is used for monitoring during a future manufacturing process.
Dependencies are inferred from the claim text.