Automated model building and batch model building for a manufacturing process, process monitoring, and fault detection
AssigneeMKS Instruments, Inc.
InventorsNouna KETTANEH, Svante Bjarne WOLD
Life of this patent
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Abstract
A method for creating a new model of a manufacturing process according to a multivariate analysis including selecting a set of data representative of multidimensional data measured during a step or phase of a manufacturing process. The method also includes determining a set of model generation conditions based on the set of data and generating the new model specifying intervals for the multidimensional data measured during a future manufacturing process based on the set of model generation conditions.
Claims21
A method for creating a new model of a manufacturing process according to a multivariate analysis, the method comprising:
- selecting a set of data representative of multidimensional data measured during a step or phase of a manufacturing process;
- determining a set of model generation conditions based on the set of data;
- and
- generating the new model specifying intervals for the multidimensional data measured during a future manufacturing process based on the set of model generation conditions.
9 The method of claim 1, wherein selecting further comprises importing raw data from one or more process tools or importing data from a previously-generated model.
10 The method of claim 9, further comprising scaling and centering of the imported data based on a unit variance or other statistical calculation.
The method of claim 9, wherein the imported data are adjusted according to a user-specified set of scaling and centering values before generation of the new model.
A system for generating data structures indicative of conditions of a manufacturing process or current quality of output of a manufacturing process, the system comprising:
- a data supply module for communication with a set of manufacturing tools used for the manufacturing process and for communication with a memory including one or more previously-generated data structures;
- a data management module in communication with the data supply module, for receiving data about the manufacturing process from the data supply module and for filtering or scaling the received data;
- and
- a model generation module in communication with the data management module or data supply module for generating a model including a set of data associated with the manufacturing process based on the data and a set of user-specified conditions.
A system for creating or updating a model according to a multivariate analysis, the system comprising:
- a user interface including:
- (a) a first window allowing a user to select raw data or data from a previously-generated model to be used to generate a new model;
- (b) a second window allowing a user to determine model generation specifications including data to be included in the generated model and data to be excluded from the generated model;
- (c) an area for displaying the data to be used to generate the model;
- and
- (d) a user-responsive command portion to provide an instruction to a model generation module upon selection by the user for generating the model;
- and
- a memory for storing the generated model.
Dependencies are inferred from the claim text.