Process control based upon a metrology delay
AssigneeAdvanced Micro Devices, Inc.
InventorsThomas J. Sonderman, Jin Wang, Naomi M. Jenkins, Elfido Coss, Jr.
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Abstract
A method and an apparatus for performing process control based upon a metrology delay. A process step is performed upon a first workpiece. Metrology data related to the first workpiece is acquired. A control adjustment based upon the metrology data is determined. A magnitude of the control adjustment is modified based upon a time period. The time period is defined by a first time frame relating to processing the first workpiece and a second time frame relating to acquiring metrology data related to the first workpiece.
Claims29
A method, comprising:
- performing a process step upon a first workpiece;
- acquiring metrology data related to said first workpiece;
- determining a control adjustment based upon said metrology data;
- determining an uncertainty level relating to said control adjustment;
- and
- modifying a magnitude of said control adjustment based upon said uncertainty level associated with a time period defined by a first time frame relating to processing said first workpiece and a second time frame relating to acquiring metrology data related to said first workpiece.
A method, comprising:
- performing a process step upon a first workpiece;
- acquiring metrology data related to said first workpiece,
- determining a control adjustment based upon said metrology data;
- calculating a process disturbance relating to processing said first workpiece;
- determining a tool health relating to processing said first workpiece;
- determining an uncertainty level relating to said control adjustments based upon the process disturbance and the tool health within a time period defined by a first time frame relating to processing said first workpiece and a second time frame relating to acquiring metrology data related to said first workpiece;
- and
- adjusting a magnitude of said control adjustment based upon a determination that said uncertainty level exceeded a predetermined threshold.
An apparatus, comprising:
- means for performing a process step upon a first workpiece;
- means for acquiring metrology data related to said first workpiece;
- means for determining a control adjustment based upon said metrology data;
- means for determining an uncertainty level relating to said control adjustment;
- and
- means for modifying a magnitude of said control adjustment based upon said uncertainty level associated with a time period defined by a first time frame relating to processing said first workpiece and a second time frame relating to acquiring metrology data related to said first workpiece.
A system, comprising:
- a processing tool to process a workpiece;
- a metrology tool to acquire metrology data relating to said first workpiece;
- and
- a process controller operatively coupled to said processing tool and said metrology data, said process controller to determine a control adjustment based upon said metrology data, determine an uncertainty level relating to said control adjustment, and modify a magnitude of said control adjustment based upon said uncertainty level associated with a time period defined by a first time frame relating to processing said workpiece and a second time frame relating to acquiring metrology data related to said workpiece.
An apparatus, comprising:
- a process controller to determine a control adjustment based upon metrology data relating to processing a workpiece, determine an uncertainty level relating to said control adjustments and modify a magnitude of said control adjustment based upon said uncertainty level associated with a time period defined by a first time frame relating to processing said workpiece and a second time frame relating to acquiring metrology data related to said workpiece.
A computer readable program storage device encoded with instructions that, when executed by a computer, performs a method, comprising:
- performing a process step upon a first workpiece;
- acquiring metrology data related to said first workpiece;
- determining a control adjustment based upon said metrology data;
- determining an uncertainty level relating to said control adjustment;
- and
- modifying a magnitude of said control adjustment based upon said uncertainty level associated with a time period defined by a first time frame relating to processing said first workpiece and a second time frame relating to acquiring metrology data related to said first workpiece.
Dependencies are inferred from the claim text.