G05B 2219/31443
Keep track of nc program, recipe program
G05B2219/31443 (Keep track of nc program, recipe program) appears on 18 US grants and 20 published applications in this corpus.
Search patents in G05B- Granted patents
- 18
- Published applications
- 20
- Assignees
- 14
- Inventors
- 65
- Latest grant
- 29 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1997 | 1 | 0 |
| 1998 | 0 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 1 | 0 |
| 2002 | 0 | 2 |
| 2003 | 1 | 1 |
| 2004 | 0 | 0 |
| 2005 | 1 | 1 |
| 2006 | 0 | 0 |
| 2007 | 2 | 3 |
| 2008 | 1 | 1 |
| 2009 | 1 | 0 |
| 2010 | 0 | 1 |
| 2011 | 1 | 0 |
| 2012 | 1 | 0 |
| 2013 | 0 | 1 |
| 2014 | 0 | 0 |
| 2015 | 0 | 3 |
| 2016 | 1 | 1 |
| 2017 | 2 | 0 |
| 2018 | 1 | 0 |
| 2019 | 1 | 0 |
| 2020 | 0 | 1 |
| 2021 | 0 | 1 |
| 2022 | 0 | 0 |
| 2023 | 1 | 1 |
| 2024 | 0 | 1 |
| 2025 | 1 | 1 |
| 2026 | 1 | 1 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Robotic workflow recipe29 Sep 2026US 12,748,406 B2Flexxbotics
- Methods and mechanisms for adjusting film deposition parameters during substrate manufacturing1 Apr 2025US 12,265,379 B2APPLIED Materials.Inc.
- Substrate processing apparatus, method of monitoring abnormality of substrate processing apparatus, and recording medium10 Oct 2023US 11,782,425 B2Kokusai Electric Corporation
- Failure detection apparatus for substrate processing apparatus, and substrate processing apparatus11 Jun 2019US 10,317,890 B2Ebara Corporation
- Updating of a recipe for evaluating a manufacturing stage of an electrical circuit30 Jan 2018US 9,880,550 B2Applied Materials Israel Ltd.
- Processing Apparatus, Substrate Processing Apparatus, Processing Method, Method of Manufacturing Semiconductor Device and Non-transitory Computer-readable Recording Medium1 Oct 2026US 2026/0299546 A1Kokusai Electric Corporation
- Methods and mechanisms for adjusting film deposition parameters during substrate manufacturing21 Aug 2025US 2025/0264867 A1APPLIED Materials.Inc.
- Robotic workflow recipe4 Apr 2024US 2024/0111275 A1Flexxbotics
- Methods and mechanisms for adjusting film deposition parameters during substrate manufacturing9 Nov 2023US 2023/0359179 A1APPLIED Materials.Inc.
- Wireless monitoring device for flexible material processing and control method thereof26 Aug 2021US 2021/0263494 A1Guangdong University of Technology
Most cited
By later US patents
- System for providing integrated monitoring, control and diagnostics functions for semiconductor spray process tools54US 5,591,299 AAdvanced Micro Devices, Inc. · 1997
- Integration of fault detection with run-to-run control45US 7,337,019 B2APPLIED Materials.Inc. · 2008
- Control system29US 6,269,279 B1Tokyo Electron Limited · 2001
- Run-to-run control over semiconductor processing tool based upon mirror image target14US 6,625,513 B1APPLIED Materials.Inc. · 2003
- Fault detection and virtual sensor methods for tool fault monitoring11US 6,895,293 B2APPLIED Materials.Inc. · 2005