Updating of a recipe for evaluating a manufacturing stage of an electrical circuit

A non-transitory computer readable medium that stores instructions that once executed by a computerized system cause the computerized system to execute the stages of:

• generating or receiving evaluation results that are indicative of an outcome of an evaluation process of at least one manufacturing stage of at least one electrical circuit;
• wherein the evaluation results differ from end of line (EOL) results and include a plurality of results generated from evaluation processes that differ from each other by one or more setup parameters;
• receiving or generating EOL results relating to the at least one electrical circuit and that indicate the existence of one or more physical defects of the at least one electrical circuit;
• correlating the evaluation results and the EOL results to provide correlation results;
• and
• determining, at the computer system, whether to alter the recipe in response to the correlation results and, if it is determined to alter the recipe altering the recipe and using the altered recipe in future processes for evaluating a plurality of electrical circuits.

A computerized system comprising:

• a yield diagnostics module configured to generate, from an evaluation recipe, evaluation results that are indicative of an outcome of an evaluation process of at least one manufacturing stage of at least one electrical circuit in the plurality of electrical circuits, wherein the evaluation results differ from end of line (EOL) results and include a plurality of results generated from evaluation processes that differ from each other by one or more setup parameters;
• and
• a recipe module configured to:
• (i) receive EOL results relating to the at least one electrical circuit and that indicate the existence of one or more physical defects of the at least one electrical circuit, (ii) receive the evaluation results relating to the at least one electrical circuit;
• (iii) correlate the evaluation results and the EOL results to provide correlation results;
• and (iv) determine whether to alter the recipe in response to the correlation results and, if it is determined to alter the recipe, altering the recipe and using the altered recipe in future processes for evaluating a plurality of electrical circuits that include microscopic elements.