Failure detection apparatus for substrate processing apparatus, and substrate processing apparatus

A substrate processing apparatus comprising:

• a polishing unit comprising:
• a top ring for holding a substrate;
• a polishing pad for polishing the substrate by rotating the polishing pad on the substrate held by the top ring;
• and
• a sensor for detecting a data relating to an operation of the polishing unit;
• a storage medium and a processor, the storage medium storing recipe data in which procedures or methods related to a process performed on the substrate by the substrate processing apparatus are defined, and storing system parameters of the substrate processing apparatus, the system parameters defining parameters applied to the substrate processing apparatus irrespective of the recipe data;
• the processor configured at least to:
• collect data detected by the sensor;
• read recipe data from the storage medium, and determining whether or not an abnormality is present in the substrate processing apparatus on the basis of the recipe data and the data collected;
• and
• read system parameters form the storage medium, and convert the recipe data read from the storage medium on the basis of the system parameters, wherein the determination compares the converted recipe data with the collected data acquisition, and
• provided information that an abnormality is present in the substrate processing apparatus if the two data items differ.

A substrate processing apparatus comprising:

• an unit for processing a substrate, the unit including a sensor for detecting data relating to an operation of the unit;
• and
• a control apparatus comprising:
• at least one storage medium having stored thereon recipe data, in which procedures or methods related to a process performed on the substrate by the substrate processing apparatus are defined, and system parameters of the substrate processing apparatus, the system parameters defining parameters applied to the substrate processing apparatus irrespective of the recipe data;
• a processor in communication with the at least one storage medium, upon execution of computer readable instruction by the processor, causing the system at least to:
• collect data detected by the sensor;
• read recipe data from the storage medium, and provide information indicative of an abnormality in the substrate processing apparatus based at least in part on the recipe data and the collected data;
• restore recipe data based at least in part on the collected data;
• and
• read system parameters from the storage medium, and convert the recipe data read from the storage medium based at least in part on the system parameters,
• wherein providing information indicative of an abnormality in the substrate processing apparatus comprises determining by the processor that the converted recipe data differs from the restored recipe data.

A substrate processing apparatus comprising:

• a process unit for processing the substrate, the process unit including a sensor for detecting a data relating to an operation of the process unit;
• and
• a control apparatus comprising a storage medium and a processor, the storage medium configured to store recipe data in which procedures or methods related to a process performed on the substrate by the substrate processing apparatus are defined, and configured to store system parameters of the substrate processing apparatus, the system parameters defining parameters applied to the substrate processing apparatus irrespective of the recipe data;
• wherein the control apparatus is configured to execute the steps of:
• collecting data detected by the sensor;
• reading recipe data from the storage medium;
• reading system parameters form the storage medium;
• converting the recipe data read from the storage medium on the basis of the system parameters;
• and
• comparing the converted recipe data with the collected data and determining that abnormality is present in the substrate processing apparatus if the two data items differ.