US 2026/0299546 A1Published application

Processing Apparatus, Substrate Processing Apparatus, Processing Method, Method of Manufacturing Semiconductor Device and Non-transitory Computer-readable Recording Medium

AssigneeKokusai Electric Corporation

InventorsTadashi OKAZAKI, Yuji YAMAOKA, Takatoshi SEKI

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Abstract

It is possible to improve a work efficiency when editing a recipe. There is provided a technique that includes: a display displaying a setting value for an item in a recipe and a state of a flag indicating whether the setting value is to be stored, wherein the recipe is constituted by a plurality of steps involving process conditions containing the item and the setting value; and a controller controlling the display such that, in a case of deleting one step, when a flag for an item in the step to be deleted is valid and a flag for the item in a subsequent step is invalid, the flag for the item in the subsequent step is switched to be valid, and a setting value for the item in the step to be deleted is passed on to a setting value for the item in the subsequent step.

Claims18

Dependent claims

A processing apparatus comprising:

a display configured to be capable of displaying at least one setting value for at least one item in a recipe and a state of a flag indicating whether the at least one setting value is to be stored, wherein the recipe is constituted by a plurality of steps in which process conditions for a substrate processing are defined and wherein the process conditions contain the at least one item and the at least one setting value for the at least one item;
and
a controller configured to be capable of controlling the display such that, in a case of deleting at least one step among the plurality of steps, when a flag for an item in the at least one step to be deleted is set to be valid and a flag for the item in a subsequent step which comes after the at least one step to be deleted is set to be invalid, the flag for the item in the subsequent step which comes after the at least one step to be deleted is switched to be valid, and a setting value for the item in the at least one step to be deleted is passed on to a setting value for the item in the subsequent step which comes after the at least one step to be deleted.

Dependencies are inferred from the claim text.