Substrate processing apparatus, method of monitoring abnormality of substrate processing apparatus, and recording medium

A method of monitoring an abnormality of a substrate processing apparatus including an operator configured to, when executing under a predetermined processing condition a process recipe including a specific step of executing a sub-recipe, control a process controller to execute the sub-recipe a plural number of times to perform a predetermined process to a substrate, and a data monitor configured to collect device data during an execution of the process recipe and store the device data in a storage part, the method comprising:

• searching the storage part;
• acquiring device data for a designated step among respective steps constituting the sub-recipe, which has been collected during the executing the sub-recipe for the plural number of times;
• calculating a first standard deviation of the device data for the designated step acquired for the plural number of times executing the sub-recipe;
• calculating a second standard deviation of a plurality of previous first standard deviations, wherein the previous first standard deviations are standard deviations of device data for the designated step that has been generated during previously executing the process recipe under the predetermined processing condition;
• calculating a threshold value based on an average of the plurality of previous first standard deviations and a value obtained by multiplying the second standard deviation and a predetermined number;
• and
• comparing the first standard deviation with the threshold value;
• and
• generating an alarm when the first standard deviation exceeds the threshold value, and
• wherein the device management controller is configured to generate the alarm and to control the main controller not to execute a process recipe scheduled to be executed next.

A non-transitory computer-readable recording medium storing a program of a substrate processing apparatus that is executed in a computer for controlling the substrate processing apparatus including:

• a main controller configured to, when executing under a predetermined processing condition a process recipe including a specific step of executing a sub-recipe, control a process controller to execute the sub-recipe a plural number of times to perform a predetermined process to a substrate;
• and
• a device management controller configured to collect device data during an execution of the process recipe and store the device data in a storage part,
• the program causing the computer to execute a process comprising:
• searching the storage part in which the device data is stored;
• acquiring device data for a designated step among respective steps constituting the sub-recipe, which has been collected during the executing the sub-recipe for the plural number of times;
• calculating a first standard deviation of the device data acquired for the plural number of times executing the sub-recipe;
• calculating a second standard deviation of a plurality of previous first standard deviations, wherein the previous first standard deviations are standard deviations of device data for the designated step that has been generated during previously executing the process recipe under the predetermined processing condition;
• calculating a threshold value based on an average of the plurality of previous first standard deviations and a value obtained by multiplying the second standard deviation and a predetermined number;
• and
• comparing the first standard deviation with the threshold value and generating an alarm when the first standard deviation exceeds the threshold value, and
• wherein the device management controller is configured to generate the alarm and to control the main controller not to execute a process recipe scheduled to be executed next.