G03F 7/70566
Polarisation control
Official title: {Polarisation control}
G03F7/70566 (Polarisation control) appears on 549 US grants and 597 published applications in this corpus.
Search patents in G03F- Granted patents
- 549
- Published applications
- 597
- Assignees
- 130
- Inventors
- 704
- Latest grant
- 30 Jun 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1979 | 1 | 0 |
| 1980 | 0 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 3 | 0 |
| 1984 | 0 | 0 |
| 1985 | 0 | 0 |
| 1986 | 0 | 0 |
| 1987 | 1 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 1 | 0 |
| 1991 | 3 | 0 |
| 1992 | 2 | 0 |
| 1993 | 4 | 0 |
| 1994 | 2 | 0 |
| 1995 | 8 | 0 |
| 1996 | 5 | 0 |
| 1997 | 8 | 0 |
| 1998 | 9 | 0 |
| 1999 | 7 | 0 |
| 2000 | 9 | 0 |
| 2001 | 10 | 6 |
| 2002 | 8 | 17 |
| 2003 | 10 | 9 |
| 2004 | 16 | 27 |
| 2005 | 13 | 51 |
| 2006 | 31 | 68 |
| 2007 | 32 | 55 |
| 2008 | 28 | 62 |
| 2009 | 33 | 66 |
| 2010 | 26 | 33 |
| 2011 | 40 | 32 |
| 2012 | 23 | 19 |
| 2013 | 25 | 23 |
| 2014 | 21 | 20 |
| 2015 | 33 | 23 |
| 2016 | 26 | 8 |
| 2017 | 38 | 21 |
| 2018 | 18 | 13 |
| 2019 | 16 | 14 |
| 2020 | 19 | 7 |
| 2021 | 7 | 5 |
| 2022 | 2 | 3 |
| 2023 | 4 | 3 |
| 2024 | 2 | 7 |
| 2025 | 2 | 4 |
| 2026 | 3 | 1 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Optical pulse stretcher, laser apparatus, and electronic device manufacturing method30 Jun 2026US 12,671,220 B2Gigaphoton Inc.
- Ultraviolet laser device and electronic device manufacturing method30 Jun 2026US 12,671,221 B2Gigaphoton Inc.
- Optical system for a lithographic projection exposure apparatus24 Mar 2026US 12,585,193 B2Carl Zeiss SMT GmbH
- Semiconductor processing tool and methods of operation26 Aug 2025US 12,399,431 B2Taiwan Semiconductor Manufacturing Company.Ltd
- Polarizer nanoimprint lithography7 Jan 2025US 12,189,161 B2Moxtek, Inc.
- Laser apparatus and electronic device manufacturing method18 Jun 2026US 2026/0171746 A1Gigaphoton Inc.
- Semiconductor processing tool and methods of operation16 Oct 2025US 2025/0321496 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Illumination mode selector and associated optical metrology tool7 Aug 2025US 2025/0251670 A1ASML Netherlands B. V.
- Polarizer nanoimprint lithography6 Mar 2025US 2025/0076554 A1Moxtek, Inc.
- Mechanically controlled stress-engineered optical systems and methods27 Feb 2025US 2025/0068090 A1ASML Netherlands B. V.
Most cited
By later US patents
- Illuminating device153US 4,974,919 ACanon Kabushiki Kaisha · 1990
- Radial polarization-rotating optical arrangement and microlithographic projection exposure system incorporating said arrangement151US 6,191,880 B1Carl-Zeiss-Stiftung · 2001
- Energy amount control device148US 5,097,291 ANikon Corporation · 1992
- Illumination optical arrangement139US 5,253,110 ANikon Corporation · 1993
- Exposure apparatus and method124US 5,673,103 AKabushiki Kaisha Toshiba · 1997