G03D 3/02
Details of liquid circulation
G03D3/02 (Details of liquid circulation) appears on 569 US grants and 68 published applications in this corpus.
Search patents in G03D- Granted patents
- 569
- Published applications
- 68
- Assignees
- 107
- Inventors
- 675
- Latest grant
- 7 Sep 2021
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 11 | 0 |
| 1977 | 19 | 0 |
| 1978 | 17 | 0 |
| 1979 | 11 | 0 |
| 1980 | 15 | 0 |
| 1981 | 15 | 0 |
| 1982 | 17 | 0 |
| 1983 | 14 | 0 |
| 1984 | 10 | 0 |
| 1985 | 14 | 0 |
| 1986 | 5 | 0 |
| 1987 | 9 | 0 |
| 1988 | 8 | 0 |
| 1989 | 11 | 0 |
| 1990 | 13 | 0 |
| 1991 | 20 | 0 |
| 1992 | 11 | 0 |
| 1993 | 18 | 0 |
| 1994 | 39 | 0 |
| 1995 | 39 | 0 |
| 1996 | 45 | 0 |
| 1997 | 34 | 0 |
| 1998 | 41 | 0 |
| 1999 | 24 | 0 |
| 2000 | 26 | 0 |
| 2001 | 12 | 5 |
| 2002 | 19 | 19 |
| 2003 | 16 | 12 |
| 2004 | 13 | 4 |
| 2005 | 3 | 7 |
| 2006 | 8 | 6 |
| 2007 | 3 | 7 |
| 2008 | 2 | 3 |
| 2009 | 0 | 2 |
| 2010 | 1 | 1 |
| 2011 | 3 | 0 |
| 2012 | 2 | 0 |
| 2013 | 0 | 1 |
| 2014 | 0 | 0 |
| 2015 | 0 | 0 |
| 2016 | 0 | 0 |
| 2017 | 0 | 0 |
| 2018 | 0 | 1 |
| 2019 | 0 | 0 |
| 2020 | 0 | 0 |
| 2021 | 1 | 0 |
By publication year. Applications have been published since 2001.
Subgroups
Granted patents
Recent patents
- Substrate treating apparatus7 Sep 2021US 11,114,316 B2SCREEN Holdings Co., Ltd.
- Spin-on film processing using acoustic radiation pressure9 Oct 2012US 8,282,999 B2Micron Technology, Inc.
- Dynamic fluid control system for immersion lithography5 Jun 2012US 8,194,229 B2Nikon Corporation
- Apparatus for and method of processing substrate25 Oct 2011US 8,043,468 B2Dainippon Screen Mfg.Co., Ltd.
- Processing solution supply system, processing solution supply method and recording medium for storing processing solution supply control program5 Apr 2011US 7,918,242 B2Tokyo Electron Limited
- Substrate treating apparatus25 Jan 2018US 2018/0025921 A1SCREEN Holdings Co., Ltd.
- Apparatus to conduct spin-on film processing17 Jan 2013US 2013/0014696 A1Micron Technology, Inc.
- Reducing foam formation9 Sep 2010US 2010/0224257 A1
- Spin-on film processing using accoustic radiation pressure8 Oct 2009US 2009/0253271 A1Micron Technology, Inc.
- Apparatus for and method of processing substrate26 Mar 2009US 2009/0080879 A1Dainippon Screen Mfg.Co., Ltd.
Most cited
By later US patents
- Processing method for silver halide color photographic light-sensitive material50US 5,698,382 AKonica Corporation · 1997
- Method for processing silver halide photographic light-sensitive materials which conserves and reuses overflow processing solutions47US 5,378,588 AKonica Corporation · 1995
- Photosensitive material processor47US 5,440,365 AEastman Kodak Company · 1995
- Apparatus for processing photosensitive material44US 5,357,307 AEastman Kodak Company · 1994
- Fluid dispenser with a magnetically operable discharge opening40US 5,294,022 AEastman Kodak Company · 1994