Substrate treating apparatus

A substrate treating apparatus that treats a substrate with processing liquids, the apparatus comprising:

• a substrate holder that holds a substrate horizontally;
• a rotary drive that is connected to the substrate holder to rotate the substrate holder around a vertical axis;
• a first processing liquid supplying nozzle that supplies a first processing liquid of the processing liquids to the substrate held with the substrate holder;
• a second processing liquid supplying nozzle that supplies a second processing liquid of the processing liquids to the substrate held with the substrate holder;
• an exterior cup surrounding a lateral side of the substrate holder;
• and
• an interior cup disposed between the substrate holder and the exterior cup,
• the interior cup including an interior cup body having an annular shape in plan view, and an interior cup outlet that is disposed on a lower portion of the interior cup body and discharges the first processing liquid and gas within the interior cup body, and
• the exterior cup including an exterior cup body having an annular shape in plan view, an exterior bottom cup that forms a bottom of the exterior cup body, a first drain outlet that is formed in a bottom face of the exterior bottom cup and drains the first processing liquid from the interior cup outlet, a first exhaust port that is formed in the exterior bottom cup and exhausts the gas from the interior cup outlet, a second drain outlet formed in the bottom face of the exterior bottom cup and drains the second processing liquid within the exterior cup body, a second exhaust port that is formed in the exterior bottom cup and exhausts the gas in the exterior cup body, and a separation partition that is erected on the bottom face of the exterior bottom cup in an annular shape in plan view and separates the first drain outlet and the second drain outlet,
• the apparatus further comprising:
• an annular member formed separately from the interior cup body, having an annular shape in plan view, movable upwardly/downwardly along an outer periphery inside the exterior cup body and connected to the interior cup body so as not to close the interior cup outlet;
• a shifting drive which engages and moves the annular member to shift the interior cup body between a collecting position where the interior cup collects the processing liquid and a retracting position where the exterior cup collects the processing liquid, wherein
• the annular member includes a plurality of connectors that connect to the interior cup body at a corresponding plurality of points located at equal angular intervals from the center in plan view.