G01R 31/2653
Using electron beams
Official title: {using electron beams}
G01R31/2653 (Using electron beams) appears on 71 US grants and 67 published applications in this corpus.
Search patents in G01R- Granted patents
- 71
- Published applications
- 67
- Assignees
- 47
- Inventors
- 177
- Latest grant
- 10 Mar 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1979 | 2 | 0 |
| 1980 | 3 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 0 | 0 |
| 1984 | 1 | 0 |
| 1985 | 1 | 0 |
| 1986 | 2 | 0 |
| 1987 | 3 | 0 |
| 1988 | 1 | 0 |
| 1989 | 2 | 0 |
| 1990 | 2 | 0 |
| 1991 | 0 | 0 |
| 1992 | 0 | 0 |
| 1993 | 0 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 0 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 2 | 0 |
| 2002 | 2 | 3 |
| 2003 | 4 | 2 |
| 2004 | 2 | 1 |
| 2005 | 1 | 1 |
| 2006 | 0 | 1 |
| 2007 | 0 | 2 |
| 2008 | 2 | 1 |
| 2009 | 0 | 1 |
| 2010 | 2 | 1 |
| 2011 | 1 | 0 |
| 2012 | 0 | 1 |
| 2013 | 1 | 3 |
| 2014 | 1 | 4 |
| 2015 | 0 | 4 |
| 2016 | 3 | 2 |
| 2017 | 2 | 5 |
| 2018 | 4 | 2 |
| 2019 | 3 | 1 |
| 2020 | 0 | 3 |
| 2021 | 3 | 5 |
| 2022 | 6 | 3 |
| 2023 | 2 | 8 |
| 2024 | 5 | 5 |
| 2025 | 7 | 4 |
| 2026 | 1 | 4 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Inspection apparatus and method10 Mar 2026US 12,571,832 B2Taiwan Semiconductor Manufacturing Company.Ltd
- Optimal determination of an overlay target2 Dec 2025US 12,487,273 B2Applied Materials Israel Ltd.
- Metal pattern inspection method and focused ion beam apparatus28 Oct 2025US 12,456,599 B2V Technology Co., Ltd.
- Systems, devices, and methods for performing a non-contact electrical measurement on a cell, non-contact electrical measurement cell vehicle, chip, wafer, die, or logic block30 Sep 2025US 12,429,520 B2PDF Solutions, Inc.
- Systems, devices, and methods for aligning a particle beam and performing a non-contact electrical measurement on a cell and/or non-contact electrical measurement cell vehicle using a registration cell30 Sep 2025US 12,431,333 B2PDF Solutions, Inc.
- Optimal determination of an overlay target26 Mar 2026US 2026/0086138 A1Applied Materials Israel Ltd.
- Detection method of mos transistor5 Mar 2026US 2026/0063701 A1United Microelectronics Corp.
- Systems, devices, and methods for performing a non-contact electrical measurement on a cell, non-contact electrical measurement cell vehicle, chip, wafer, die, or logic block8 Jan 2026US 2026/0009845 A1PDF Solutions, Inc.
- Systems, devices, and methods for aligning a particle beam and performing a non-contact electrical measurement on a cell and/or non-contact electrical measurement cell vehicle using a registration cell8 Jan 2026US 2026/0011529 A1PDF Solutions, Inc.
- Inspection apparatus and method27 Nov 2025US 2025/0362335 A1Taiwan Semiconductor Manufacturing Company.Ltd
Most cited
By later US patents
- Non-linear light-emitting load current control125US 6,285,139 B1GELcore, LLC · 2001
- Electron-beam probing of photodiodes86US 4,730,158 ASanta Barbara Research Center · 1988
- Emission microscope74US 4,680,635 AIntel Corporation · 1987
- Optical to optical infrared imaging detection system68US 8,405,823 B2Attofemto, Inc. · 2013
- Voltage testing and measurement57US 6,803,777 B22004