Systems, devices, and methods for performing a non-contact electrical measurement on a cell, non-contact electrical measurement cell vehicle, chip, wafer, die, or logic block

A computer-readable medium storing a set of instructions thereon, which when executed by a processor cause the processor to:

• receive a recipe for a die included in a wafer, the die being divided into a plurality of tiles, each tile having an exact center point and a settling window and including a registration area and a plurality of non-contact electronic measurement (NCEM)-enabled cells, the recipe including a position for the die within the wafer, a position of the registration area, and a position for each of the NCEM-enabled cell of the plurality of NCEM-enabled cells;
• determine an expected position of a registration area included in a tile of the plurality of tiles using the recipe;
• receive position information for the tile;
• determine whether at least one of the settling window and the exact center point is centered within a field of view of an electron beam column and, if so, instructing an electron beam column to scan a region of the tile corresponding to the expected position of the registration area using an electron beam;
• receive an image of the region of the tile corresponding to the expected position of the registration area that has been scanned;
• determine an actual position of the registration area using the image;
• align the electron beam using the actual position of the registration area;
• sequentially direct the aligned electron beam toward each of NCEM-enabled cells of the plurality of NCEM-enabled cells within the tile of the plurality of tiles;
• receive a response of each of the NCEM-enabled cells to the aligned electron beam;
• and
• provide an indication of the response to a processor.

A computer-readable medium storing a set of instructions thereon, which when executed by a processor cause the processor to:

• receive a recipe for non-contact electronic measurement (NCEM)-enabled cell vehicle;
• identify a plurally of target regions of the NCEM-enabled cell within the NCEM-enabled cell vehicle;
• determine a position for each of the target regions of the plurality of target regions of the NCEM-enabled cell vehicle;
• direct an electron beam toward each target region based the position of the plurality of target regions;
• receive plurality of indications of a response to the electron beam, each indication in the plurality of indications indicating a response to the electron beam for each target region;
• compare the indications for a plurality of the target regions;
• and
• provide a result of the comparison to a processor.