G01Q 10/02
Coarse scanning or positioning
G01Q10/02 (Coarse scanning or positioning) appears on 76 US grants and 53 published applications in this corpus.
Search patents in G01Q- Granted patents
- 76
- Published applications
- 53
- Assignees
- 58
- Inventors
- 181
- Latest grant
- 10 Feb 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1988 | 1 | 0 |
| 1989 | 4 | 0 |
| 1990 | 2 | 0 |
| 1991 | 3 | 0 |
| 1992 | 2 | 0 |
| 1993 | 2 | 0 |
| 1994 | 1 | 0 |
| 1995 | 2 | 0 |
| 1996 | 0 | 0 |
| 1997 | 2 | 0 |
| 1998 | 3 | 0 |
| 1999 | 3 | 0 |
| 2000 | 2 | 0 |
| 2001 | 4 | 2 |
| 2002 | 3 | 3 |
| 2003 | 1 | 2 |
| 2004 | 2 | 3 |
| 2005 | 5 | 4 |
| 2006 | 4 | 3 |
| 2007 | 0 | 2 |
| 2008 | 3 | 2 |
| 2009 | 2 | 0 |
| 2010 | 0 | 3 |
| 2011 | 0 | 2 |
| 2012 | 2 | 2 |
| 2013 | 5 | 2 |
| 2014 | 1 | 2 |
| 2015 | 1 | 2 |
| 2016 | 2 | 2 |
| 2017 | 1 | 3 |
| 2018 | 3 | 4 |
| 2019 | 0 | 1 |
| 2020 | 2 | 1 |
| 2021 | 3 | 2 |
| 2022 | 2 | 2 |
| 2023 | 1 | 0 |
| 2024 | 1 | 1 |
| 2025 | 0 | 2 |
| 2026 | 1 | 1 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Automated landing method of a scanning probe microscopy system and scanning probe microscopy system using the same10 Feb 2026US 12,546,800 B2Nearfield Instruments B.V.
- Atomic nano-positioning device24 Dec 2024US 12,174,218 B2National Research Council of Canada
- Method and device for measuring dimension of semiconductor structure23 May 2023US 11,656,245 B2Changxin Memory Technologies, Inc.
- Surface analysis device15 Nov 2022US 11,499,989 B2Shimadzu Corporation
- Modular scanning probe microscope head18 Oct 2022US 11,474,127 B2Rutgers, The State University of New Jersey
- Manipulator, detection device and method for detecting physical feature of micro-nano component29 Jan 2026US 2026/0029425 A1Mesoscope Technology Co., Ltd.
- Probes, apparatuses and methods for use in scanning probe microscopy26 Jun 2025US 2025/0208163 A1Yeda Research and Development Co. Ltd.
- Scanning probe microscope22 May 2025US 2025/0164522 A1Shimadzu Corporation
- Automated landing method of a scanning probe microscopy system and scanning probe microscopy system using the same4 Apr 2024US 2024/0110939 A1Nearfield Instruments B.V.
- Atomic nano-positioning device22 Sep 2022US 2022/0299544 A1National Research Council of Canada
Most cited
By later US patents
- Large stage system for scanning probe microscopes and other instruments125US 5,672,816 APark Scientific Instruments · 1997
- Object inspection and/or modification system and method89US 6,337,479 B12002
- Dual stage instrument for scanning a specimen87US 5,948,972 AKLA-Tencor Corporation · 1999
- Dual stage instrument for scanning a specimen85US 6,267,005 B1KLA-Tencor Corporation · 2001
- Moving apparatus, a moving method and an information detection and/or input apparatus using the same46US 5,414,690 ACanon Kabushiki Kaisha · 1995