Dual stage instrument for scanning a specimen

An instrument for sensing a sample, comprising:

• a probe having a sensing tip for sensing a first parameter of the sample;
• a coarse stage causing relative motion between the sensing tip and the sample;
• a fine stage causing relative motion between the sensing tip and the sample;
• a sensor spaced apart from the tip for sensing a second optical parameter of the sample;
• and
• at least one controller controlling the two stages and the sensor so that each of the coarse and fine stages causes the sensing tip to scan across the sample when the sensing tip is sensing said first parameter at a location of the sample and the sensor is sensing said second optical parameter of the sample substantially at said location.

An instrument for sensing a sample, comprising:

• a probe having a stylus arm with a sensing tip for sensing a parameter of the sample and a member supporting the stylus arm so that the stylus arm is rotatable about the member;
• a coarse stage causing relative motion between the sensing tip and the sample;
• a fine stage causing relative motion between the sensing tip and the sample;
• and
• at least one controller controlling the two stages so that the coarse stage causes the sensing tip to scan across the surface of the sample when the sensing tip is sensing said parameter of the sample.

An instrument for sensing a sample, comprising:

• a probe having a sensing tip that does not emit or transmit light for sensing a parameter of the sample, said sensing tip having a dynamic range in a direction normal to a surface of the sample greater than that of a scanning probe microscope;
• a coarse stage causing relative motion between the sensing tip and the sample;
• a fine stage causing relative motion between the sensing tip and the sample;
• and
• at least one controller controlling the two stages so that the coarse stage causes the sensing tip to scan across the surface of the sample when the sensing tip is sensing said parameter of the sample.

An instrument for sensing a sample, comprising:

• a probe having a stylus arm which has a sensing tip for sensing a parameter of the sample;
• a coarse stage causing relative motion between the sensing tip and the sample,
• a fine stage causing relative motion between the sensing tip and the sample;
• and
• at least one controller controlling the two stages so that the relative motion caused by either one or both of the two stages causes relative motion between the sensing tip and the sample when the sensing tip is sensing said parameter of the sample;
• said probe further comprising a flexure hinge connected to the arm, a force coil and means for passing current into the coil and a magnet, the force coil, or the magnet being connected to the arm, wherein electromagnetic interactions between the current in the coil and the magnet move the arm towards or away from the sample;
• said instrument further comprising a first member supporting the flexure hinge, and a second member connected to the arm for supporting the force coil, wherein the two members, the flexure hinge, and the arm are formed from a single sheet of material to form a planar body.