Scanning probe microscope
AssigneeShimadzu Corporation
InventorMasato HIRADE
Life of this patent
Estimating the term…
Abstract
The control device (100) controls the deflection amount (D2), which is the pressing amount, to a deflection amount (D1), which is a target value (DT), based on the set value (DS1, DS2) of the pressing amount when pressing the cantilever (12) against the sample (S) when measuring the force curve, and changing the set value (DS1) to the set value (DS2) based on the deflection amount (D3), which is differential data indicating the difference between the deflection amount (D1), which is the target value (DT), and the deflection amount (D), which is the actual pressing amount, in a previously performed force curve measurement when measuring the force curve.
Claims6
A scanning probe microscope comprising:
- a sample stage configured to place a sample thereon;
- a cantilever provided with a probe;
- and
- a control device,
- wherein the cantilever is positioned to face the sample stage, and
- wherein the control device is configured to
- control a pressing amount of the cantilever against the sample to a target value based on a set value of the pressing amount, when measuring a force curve, and
- change the set value based on differential data indicating a difference between the target value in a previously performed force curve measurement and an actual pressing amount, when measuring the force curve.
Dependencies are inferred from the claim text.