Surface analysis device

A surface analysis device for analyzing a sample surface, comprising:

• a sample stage configured to place a sample thereon;
• a measurement unit including a cantilever to be arranged to face the sample stage and a cantilever drive unit for driving the cantilever;
• and
• a drive mechanism configured to relatively displace the measurement unit and the sample stage,
• wherein the drive mechanism is configured, when taking out the sample stage, to shift the sample stage relative to the measurement unit so that the measurement unit and the sample stage separate from each other in a first direction in which the cantilever and the sample stage face each other, and then slidably move the sample stage in a second direction intersecting with the first direction,
• wherein the drive mechanism includes a sample stage holding unit for holding the sample stage and a moving mechanism for moving the sample stage between a measurement position and a sample take-out position,
• wherein the first direction is a vertical direction,
• wherein the moving mechanism is configured to lift and lower the sample stage holding unit so that the sample stage is lifted and lowered between the measurement position and a retracted position positioned lower than the measurement position and slidably move the sample stage holding unit so that the sample stage is moved between the sample take-out position and the retracted position,
• wherein the surface analysis device further comprises a housing configured to accommodate the sample stage, the sample stage holding unit, and the moving mechanism in a state in which the sample stage is positioned at the measurement position, and
• wherein when the sample stage holding unit is slidably moved so that the sample stage is moved from the retracted position to the sample take-out position, the sample stage is exposed to an outside from an inside of the housing.