Moving apparatus, a moving method and an information detection and/or input apparatus using the same

An apparatus for effecting at least one of information detection from a predetermined object and information input to said predetermined object, said apparatus comprising:

• a probe for detecting at least one of the information detection from said object and the information input to said object;
• a first actuator for coarsely moving at least one of said probe and said object relative to the other in a predetermined direction to bring said probe and said object close to each other;
• a second actuator for vibrating at least one of said probe and said object relative to the other in a direction parallel to a surface of said object;
• a detection section for detecting a physical phenomenon occurring between said probe and said object and for producing a detection output;
• and
• a control section for controlling said second actuator to vibrate at least one of said probe and said object relative to the other in the direction parallel to the surface of said object, and for controlling said first actuator to control the approach of said probe relative to said object, on the basis of the detection output by said detection section during the vibrating by said second actuator.

A method of moving a probe relative to a predetermined object to cause a physical phenomenon to occur between said probe and said object, and to cause said probe to approach said object, said method comprising the steps of:

• finely vibrating at least one of said probe and said object relative to the other in a direction parallel to a surface of said object;
• detecting a physical phenomenon occurring between said probe and said object and producing a detection output;
• coarsely moving, in an approach, at least one of said probe and said object relative to the other to bring said probe and said object close to each other;
• and
• controlling the moving for the approach of said probe relative to said object in said approach moving step on the basis of the detection output produced in said detecting step during the vibrating in said vibrating step.

An apparatus for moving a probe relative to a predetermined object to cause a physical phenomenon to occur between said probe and said object, and to cause said probe to approach said object, said apparatus comprising:

• a first actuator for coarsely moving at least one of said probe and said object relative to the other in a predetermined direction to bring said probe and said object close to each other;
• a second actuator for vibrating at least one of said probe and said object relative to the other in a direction in which said probe and said object are brought close to each other;
• a detection section for detecting a physical phenomenon occurring between said probe and said object and for producing a detection output;
• and
• a control section for controlling said second actuator to repeat a first operation for bringing said probe and said object close to each other by a first predetermined amount, to perform a second operation for spacing said probe and said object apart from each other by a second predetermined amount, and a third operation for bringing said probe and said object close to each other by a third predetermined amount, less than the first predetermined amount, until said detection section detects the physical phenomenon, wherein the second and third operations are performed at the same time.

An apparatus for effecting at least one of detection of information from a predetermined object and input of information to the predetermined object, said apparatus comprising:

• a probe for effecting at least one of detection of the information from the object and input of the information to the object;
• an actuator for relatively moving said probe and the object to bring said probe and the object close to each other while relatively vibrating said probe and the object in a direction parallel to a surface of the object;
• a detection section for detecting a physical phenomenon occurring between said probe and the object and for producing a detection result;
• and
• a control section for controlling said actuator to stop bringing said probe and the object close to each other, on the basis of the detection result of said detection section.

A method of effecting at least one of detection of information from a predetermined object and input of information to the predetermined object, by using a probe, said method comprising:

• relatively vibrating the probe and the object in a direction parallel to a surface of the object;
• detecting a physical phenomenon occurring between the probe and the object and producing a detection result;
• relatively moving the probe and the object to bring the probe and the object close to each other;
• and
• controlling the relative movement in said moving, on the basis of the detection result in said detecting step, during relative vibration of the probe and the object in said vibrating step.