G01N 2201/103
Scanning by mechanical motion of stage
G01N2201/103 (Scanning by mechanical motion of stage) appears on 129 US grants and 143 published applications in this corpus.
Search patents in G01N- Granted patents
- 129
- Published applications
- 143
- Assignees
- 117
- Inventors
- 386
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1978 | 1 | 0 |
| 1979 | 0 | 0 |
| 1980 | 0 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 0 | 0 |
| 1984 | 0 | 0 |
| 1985 | 0 | 0 |
| 1986 | 0 | 0 |
| 1987 | 4 | 0 |
| 1988 | 2 | 0 |
| 1989 | 2 | 0 |
| 1990 | 3 | 0 |
| 1991 | 4 | 0 |
| 1992 | 3 | 0 |
| 1993 | 0 | 0 |
| 1994 | 2 | 0 |
| 1995 | 1 | 0 |
| 1996 | 0 | 0 |
| 1997 | 1 | 0 |
| 1998 | 0 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 0 | 0 |
| 2002 | 0 | 0 |
| 2003 | 0 | 1 |
| 2004 | 1 | 7 |
| 2005 | 0 | 3 |
| 2006 | 7 | 5 |
| 2007 | 4 | 2 |
| 2008 | 1 | 1 |
| 2009 | 2 | 3 |
| 2010 | 1 | 1 |
| 2011 | 1 | 3 |
| 2012 | 2 | 5 |
| 2013 | 4 | 2 |
| 2014 | 2 | 5 |
| 2015 | 4 | 10 |
| 2016 | 9 | 12 |
| 2017 | 6 | 6 |
| 2018 | 5 | 6 |
| 2019 | 2 | 7 |
| 2020 | 11 | 4 |
| 2021 | 5 | 3 |
| 2022 | 3 | 8 |
| 2023 | 6 | 12 |
| 2024 | 6 | 15 |
| 2025 | 12 | 6 |
| 2026 | 12 | 16 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Vision inspection apparatus and vision inspection method6 Oct 2026US 12,755,365 B2
- Scanning diffraction based overlay scatterometry25 Aug 2026US 12,716,837 B2KLA Corporation
- Three-dimensional sample scanning system18 Aug 2026US 12,708,897 B2Stilla Technologies
- Defect inspection device and defect inspection method7 Jul 2026US 12,674,764 B2Hitachi High-Tech Corporation
- Continuous scanning optical assembly and method of use thereof2 Jun 2026US 12,644,835 B2Truvian Sciences, Inc.
- Continuous scanning optical assembly and method of use thereof8 Oct 2026US 2026/0309624 A1Truvian Sciences, Inc.
- Imaging device, substrate observation apparatus, substrate processing apparatus, and imaging method8 Oct 2026US 2026/0313229 A1SCREEN Holdings Co., Ltd.
- Erosion Measurement System for Turbine Blade17 Sep 2026US 2026/0276554 A1Korea East-West Power Co., Ltd.
- Defect Inspection System17 Sep 2026US 2026/0276558 A1Hitachi High-Tech Corporation
- Optical foreign matter inspection device and program27 Aug 2026US 2026/0251582 A1Hitachi High-Tech Corporation
Most cited
By later US patents
- Quantitative light microscope using a solid state detector in the primary image plane107US 4,845,552 A1989
- Inspecting apparatus for determining presence and location of foreign particles on reticles or pellicles75US 4,966,457 ANikon Corporation · 1990
- Semiconductor wafer scanning system74US 4,689,491 ADatasonics Corp. · 1987
- Method and apparatus for the automated analysis of three-dimensional objects72US 5,030,008 AKLA Instruments Corporation · 1991
- Apparatus and method for the manipulation, processing and observation of small particles, in particular biological particles63US 5,689,109 A1997