Defect Inspection System

Abstract

In order to accurately correct positional deviation due to vibration even in a state in which defect inspection is being performed under various inspection modes (inspection conditions), the present disclosure proposes a defect inspection system comprising (i) a lighting detection unit having a light source that irradiates a sample with light, and a detector that detects light from the sample, (ii) a stage mechanism for holding the sample that includes a rectilinear stage and a rotary stage, position sensors that measure the position of the rectilinear stage and the rotary stage, and an accelerometer for measuring the vibration of the rectilinear stage and the rotary stage, and (iii) a control unit for obtaining defect coordinates indicating the position of a defect on the basis of measurement values from the position sensors, wherein (iv) the control unit compares an output reference model of the accelerometer that has been calculated in advance in accordance with an inspection mode defining a sample inspection method, with a value actually measured by the accelerometer during the inspection of the sample in accordance with the inspection mode, to determine a mechanical positional deviation amount in the stage mechanism, and corrects the defect coordinates using the mechanical positional deviation amount (see FIG. 6).

Dependencies are inferred from the claim text.