Method and apparatus for the automated analysis of three-dimensional objects
AssigneeKLA Instruments Corporation
InventorsRichard S. F. Scott, Yoram Uziel, Franco A. Filice
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AssigneeKLA Instruments Corporation
InventorsRichard S. F. Scott, Yoram Uziel, Franco A. Filice
Estimating the term…
An optomechanical system for illuminating and imaging selected portions of a three dimensional object having specularly reflective surfaces, including a two dimensional image sensor for receiving light reflected from the selected portions and producing an analog output signal representing a two dimensional image of the selected portions over a predetermined time period, a video digitizer for receiving and converting the analog output signal to a digital signal, and an image computer for receiving the digital signal output by the video digitizer, comparing the information obtained from the output digital signal to the stored specifications of a master of the imaged portion of the object, indicating whether the imaged object meets the specifications of the master, controlling the movement of the imaged object, and controlling the operation of the system.
An apparatus for automatically analyzing the physical characteristics of a selected portion of a three dimensional object having specularly reflective surfaces, comprising:
A method for automatically determining the distance from a selected portion of a three dimensional object to an optical analysis system imaging said portion as a means of measuring a physical relationship of said portion to said object, comprising the steps of:
A method for automatically analyzing the physical characteristics of selected portions of a three dimensional object having specularly reflective surfaces, comprising the steps of:
Dependencies are inferred from the claim text.