G01N 2021/8861
Determining coordinates of flaws
Official title: {Determining coordinates of flaws}
G01N2021/8861 (Determining coordinates of flaws) appears on 304 US grants and 370 published applications in this corpus.
Search patents in G01N- Granted patents
- 304
- Published applications
- 370
- Assignees
- 204
- Inventors
- 875
- Latest grant
- 22 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1985 | 2 | 0 |
| 1986 | 0 | 0 |
| 1987 | 0 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 1 | 0 |
| 1991 | 2 | 0 |
| 1992 | 0 | 0 |
| 1993 | 0 | 0 |
| 1994 | 2 | 0 |
| 1995 | 2 | 0 |
| 1996 | 1 | 0 |
| 1997 | 1 | 0 |
| 1998 | 0 | 0 |
| 1999 | 1 | 0 |
| 2000 | 1 | 0 |
| 2001 | 1 | 2 |
| 2002 | 4 | 8 |
| 2003 | 4 | 0 |
| 2004 | 2 | 7 |
| 2005 | 3 | 3 |
| 2006 | 6 | 11 |
| 2007 | 4 | 7 |
| 2008 | 7 | 15 |
| 2009 | 10 | 10 |
| 2010 | 9 | 13 |
| 2011 | 9 | 5 |
| 2012 | 9 | 13 |
| 2013 | 10 | 13 |
| 2014 | 7 | 5 |
| 2015 | 10 | 8 |
| 2016 | 8 | 6 |
| 2017 | 14 | 17 |
| 2018 | 7 | 16 |
| 2019 | 13 | 17 |
| 2020 | 22 | 22 |
| 2021 | 14 | 30 |
| 2022 | 19 | 36 |
| 2023 | 20 | 15 |
| 2024 | 24 | 36 |
| 2025 | 33 | 24 |
| 2026 | 22 | 31 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Classification of defect patterns of substrates22 Sep 2026US 12,743,765 B2APPLIED Materials.Inc.
- Overlay measurement apparatus and overlay measurement method8 Sep 2026US 12,730,079 B2Auros Technology, Inc.
- Debris determination method8 Sep 2026US 12,731,247 B2Shin-Etsu Handotai Co., Ltd.
- Method for fault analysis in wafers18 Aug 2026US 12,710,377 B2Robert Bosch GmbH
- Detection system and method, computer device, and computer readable storage medium14 Jul 2026US 12,680,997 B2Reemoon Technology Co., Ltd.
- Inspection apparatus, inspection method using the inspection apparatus, and electronic device inspected by the inspection apparatus1 Oct 2026US 2026/0298836 A1Samsung Display Co., Ltd.
- Inspection apparatus and determination model generation method10 Sep 2026US 2026/0266737 A1Astemo, Ltd.
- Systems and methods to analyze multimodal spectroscopy data to profile samples30 Jul 2026US 2026/0219191 A1
- Defect inspection device, processing device, and defect inspection method30 Jul 2026US 2026/0219201 A1Hitachi High-Tech Corporation
- Evaluation method and evaluation apparatus23 Jul 2026US 2026/0210824 A1Daikin Industries, Ltd.
Most cited
By later US patents
- Two-phase optical inspection method and apparatus for defect detection177US 5,699,447 AOrbot Instruments Ltd. · 1997
- Substrate inspection method and apparatus100US 6,178,257 B1APPLIED Materials.Inc. · 2001
- High speed, high resolution web inspection system74US 5,305,392 APhilip Morris Incorporated · 1994
- Optical inspection method and apparatus62US 5,982,921 AAPPLIED Materials.Inc. · 1999
- Method and apparatus for nondestructively measuring micro defects in materials43US 5,032,734 AVti, L.L.C. · 1991