Inspection apparatus and determination model generation method
AssigneeAstemo, Ltd.
InventorsTakumi NITO, Yoshihiko KOBAYASHI, Naoki HOSOYA, Takashi WATANABE, Masatoshi ICHINOSE
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AssigneeAstemo, Ltd.
InventorsTakumi NITO, Yoshihiko KOBAYASHI, Naoki HOSOYA, Takashi WATANABE, Masatoshi ICHINOSE
Estimating the term…
An inspection apparatus includes a pseudo defect target image generation portion configured to generate a pseudo defect target image by synthesizing a pseudo defect element image mimicking a defective portion with a normal target image. The pseudo defect target image generation portion is configured to change at least one of a state of the pseudo defect element image, a synthesization position in the normal target image, or a state of the synthesization position in the normal target image according to the synthesization position in the normal target image at which the pseudo defect element image is synthesized, the state of the synthesization position in the normal target image, and the state of the pseudo defect element image, and synthesize the pseudo defect element image at the synthesization position in the normal target image. The inspection apparatus further includes a learning processing portion, and a determination processing portion.
An inspection apparatus configured to detect a defect in an inspection target using a target image acquired by imaging the inspection target, the inspection apparatus comprising:
An inspection method for detecting a defect in an inspection target using a target image acquired by imaging the inspection target, the inspection method comprising:
Dependencies are inferred from the claim text.