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US 12,710,377 B2Granted
Method for fault analysis in wafers
AssigneeRobert Bosch GmbH
InventorsWaldemar Smirnov, Ralf Augke, Michel Janus, Thomas Schnitzler
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Abstract
A method for fault analysis in wafers includes determining multiple wafer maps comprising indications of anomalies of the wafers, performing an evaluation based on the determined wafer maps, and performing the fault analysis based on the evaluation performed. Performing the evaluation includes multiple execution of a cluster analysis based on the determined wafer maps using different parameters, and identifying distinct clusters determined by the differently parameterized cluster analyses.
Claims9
A method for fault analysis in wafers, comprising:
- determining wafer maps comprising indications of anomalies of the wafers, the determined wafer maps including wafer maps for different wafers;
- combining the determined wafer maps to form a matrix, the determined wafers being combined (i) using dimensional extension, (ii) using a subsequent dimensional reduction, and (iii) using hyperparameters;
- evaluating the determined wafer maps by (i) performing multiple executions of a cluster analysis on the matrix of the determined wafer maps, each of the multiple executions using different parameters for the cluster analysis, and (ii) identifying sets of clusters of the determined wafer maps, each respective set of clusters resulting from a respective execution of the multiple executions of the cluster analysis;
- and
- performing the fault analysis based on the sets of clusters.
2 more elements
Dependencies are inferred from the claim text.