G01B 11/0666
Using an exciting beam and a detection beam including surface acoustic waves
Official title: {using an exciting beam and a detection beam including surface acoustic waves [SAW]}
G01B11/0666 (Using an exciting beam and a detection beam including surface acoustic waves) appears on 68 US grants and 57 published applications in this corpus.
Search patents in G01B- Granted patents
- 68
- Published applications
- 57
- Assignees
- 46
- Inventors
- 119
- Latest grant
- 30 Jun 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1985 | 1 | 0 |
| 1986 | 0 | 0 |
| 1987 | 0 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 0 | 0 |
| 1993 | 0 | 0 |
| 1994 | 1 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 1 | 0 |
| 1998 | 1 | 0 |
| 1999 | 0 | 0 |
| 2000 | 8 | 0 |
| 2001 | 4 | 0 |
| 2002 | 3 | 4 |
| 2003 | 3 | 5 |
| 2004 | 5 | 2 |
| 2005 | 1 | 0 |
| 2006 | 2 | 4 |
| 2007 | 3 | 4 |
| 2008 | 4 | 1 |
| 2009 | 2 | 2 |
| 2010 | 3 | 2 |
| 2011 | 1 | 2 |
| 2012 | 0 | 3 |
| 2013 | 1 | 0 |
| 2014 | 5 | 2 |
| 2015 | 1 | 2 |
| 2016 | 0 | 1 |
| 2017 | 1 | 0 |
| 2018 | 0 | 4 |
| 2019 | 1 | 2 |
| 2020 | 3 | 5 |
| 2021 | 3 | 3 |
| 2022 | 1 | 3 |
| 2023 | 1 | 1 |
| 2024 | 5 | 1 |
| 2025 | 2 | 4 |
| 2026 | 1 | 0 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Non-destructive estimation of coating layer thickness based on sweep frequency photo acoustic guided wave technique30 Jun 2026US 12,669,324 B2Tata Consultancy Services Limited
- Additive manufacturing with photo-acoustic tomography defect testing26 Aug 2025US 12,397,353 B2Seurat Technologies, Inc.
- Hybrid metrology method and system22 Jul 2025US 12,366,533 B2
- Imaging system22 Oct 2024US 12,123,822 B2Daegu Gyeongbuk Institute of Science and Technology
- Plasma processing apparatus and plasma processing method27 Aug 2024US 12,074,076 B2Hitachi High-Tech Corporation
- Hybrid metrology method and system25 Dec 2025US 2025/0389665 A1
- Additive Manufacturing with Photo-Acoustic Tomography Defect Testing20 Nov 2025US 2025/0353082 A1Seurat Technologies, Inc.
- Raman spectroscopy based measurements in patterned structures17 Apr 2025US 2025/0123210 A1Nova Ltd.
- Hybrid metrology method and system2 Jan 2025US 2025/0003882 A1
- Non-destructive estimation of coating layer thickness based on sweep frequency photo acoustic guided wave technique9 May 2024US 2024/0151515 A1Tata Consultancy Services Limited
Most cited
By later US patents
- Thin film thickness measurement with thermal waves157US 4,522,510 ATherma-Wave, Inc. · 1985
- Measurement of material properties with optically induced phonons101US 5,633,711 AMassachusettes Institute of Technology · 1997
- Method and device for measuring the thickness of opaque and transparent films78US 5,812,261 AActive Impulse Systems, Inc. · 1998
- Method and device for measuring the thickness of opaque and transparent films75US 6,081,330 AActive Impulse Systems, Inc. · 2000
- Method and device for measuring the thickness of opaque and transparent films55US 6,348,967 B1Active Impulse Systems, Inc. · 2002