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AssigneeActive Impulse Systems, Inc.
InventorsKeith A. Nelson, John A. Rogers, Matthew J. Banet, John Hanselman, Martin Fuchs
Estimating the term…
A method for determining the thickness of a thin sample is described. The method includes the step of exciting time-dependent acoustic waveguide modes in the sample with an excitation radiation field. The acoustic waveguide modes are detected by diffracting probe radiation off a ripple morphology induced on the sample's surface by the acoustic waveguide modes. The diffracted probe radiation is then analyzed to measure phase velocities or frequencies of the acoustic waveguide modes. A thickness of the thin sample is determined by comparing the measured phase velocities or frequencies to the phase velocities or frequencies calculated from a mathematical model.
A method for determining the thickness of a thin metal film which forms part of a sample at more than one location, the method comprising:
A film-measuring instrument for determining the thickness of a thin metal film which forms part of a sample, the instrument comprising:
Dependencies are inferred from the claim text.