C23C 14/0094
In transition mode
Official title: {in transition mode}
C23C14/0094 (In transition mode) appears on 37 US grants and 37 published applications in this corpus.
Search patents in C23C- Granted patents
- 37
- Published applications
- 37
- Assignees
- 28
- Inventors
- 105
- Latest grant
- 7 Jul 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1994 | 1 | 0 |
| 1995 | 1 | 0 |
| 1996 | 0 | 0 |
| 1997 | 1 | 0 |
| 1998 | 0 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 0 | 0 |
| 2002 | 2 | 0 |
| 2003 | 1 | 1 |
| 2004 | 0 | 0 |
| 2005 | 0 | 1 |
| 2006 | 0 | 2 |
| 2007 | 0 | 1 |
| 2008 | 0 | 0 |
| 2009 | 0 | 1 |
| 2010 | 1 | 0 |
| 2011 | 0 | 2 |
| 2012 | 3 | 1 |
| 2013 | 0 | 0 |
| 2014 | 0 | 1 |
| 2015 | 2 | 5 |
| 2016 | 1 | 4 |
| 2017 | 5 | 2 |
| 2018 | 3 | 3 |
| 2019 | 4 | 1 |
| 2020 | 3 | 4 |
| 2021 | 1 | 2 |
| 2022 | 3 | 2 |
| 2023 | 1 | 0 |
| 2024 | 1 | 3 |
| 2025 | 2 | 0 |
| 2026 | 1 | 1 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Al-rich AlTiN-based films7 Jul 2026US 12,674,231 B2Oerlikon Surface Solutions AG, PfäFfikon
- Optical film, sputtering target, and method of producing optical film13 May 2025US 12,297,528 B2Sumitomo Metal Mining Co., Ltd.
- Method and device for producing uniform films on moving substrates and films produced in this way4 Feb 2025US 12,217,947 B2Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V.
- Al-rich AlTin-based films23 Apr 2024US 11,965,234 B2Oerlikon Surface Solutions AG, PfäFfikon
- Method and apparatus for deposition of metal nitrides29 Aug 2023US 11,739,418 B2APPLIED Materials.Inc.
- Process to deposit quantized nano layers by magnetron sputtering15 Jan 2026US 2026/0015711 A1
- Conductive silicon sputtering targets15 Aug 2024US 2024/0271270 A1Soleras Advanced Coatings BV
- Al-rich altin-based films8 Feb 2024US 2024/0043985 A1Oerlikon Surface Solutions AG, PfäFfikon
- Method and Apparatus for Deposition of Mental Nitrides4 Jan 2024US 2024/0003000 A1APPLIED Materials.Inc.
- Optical film, sputtering target, and method of producing optical film6 Oct 2022US 2022/0316049 A1Sumitomo Metal Mining Co., Ltd.
Most cited
By later US patents
- Stable high rate reactive sputtering56US 6,537,428 B1Veeco Instruments Inc. · 2003
- High-rate reactive sputtering of dielectric stoichiometric films47US 9,637,814 B2Trumpf Huettinger Sp. Z O. O. · 2017
- Method for reactive sputter coating at least one article38US 5,292,417 ABalzers Aktiengesellschaft · 1994
- Ion assisted deposition for rare-earth oxide based coatings on lids and nozzles38US 9,583,369 B2APPLIED Materials.Inc. · 2017
- Apparatus for reactive sputter coating at least one article22US 5,423,970 ABalzers Aktiengesellschaft · 1995