B08B 5/00
Cleaning by methods involving the use of air flow or gas flow
Official title: Cleaning by methods involving the use of air flow or gas flow (cleaning hollow articles by methods or apparatus specially adapted thereto B08B9/00)
B08B5/00 (Cleaning by methods involving the use of air flow or gas flow) appears on 2,061 US grants and 2,640 published applications in this corpus.
Search patents in B08B- Granted patents
- 2,061
- Published applications
- 2,640
- Assignees
- 1,339
- Inventors
- 5,859
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 8 | 0 |
| 1977 | 8 | 0 |
| 1978 | 2 | 0 |
| 1979 | 3 | 0 |
| 1980 | 7 | 0 |
| 1981 | 7 | 0 |
| 1982 | 8 | 0 |
| 1983 | 5 | 0 |
| 1984 | 4 | 0 |
| 1985 | 0 | 0 |
| 1986 | 8 | 0 |
| 1987 | 5 | 0 |
| 1988 | 5 | 0 |
| 1989 | 8 | 0 |
| 1990 | 8 | 0 |
| 1991 | 12 | 0 |
| 1992 | 7 | 0 |
| 1993 | 7 | 0 |
| 1994 | 19 | 0 |
| 1995 | 13 | 0 |
| 1996 | 15 | 0 |
| 1997 | 16 | 0 |
| 1998 | 16 | 0 |
| 1999 | 22 | 0 |
| 2000 | 29 | 0 |
| 2001 | 31 | 7 |
| 2002 | 25 | 18 |
| 2003 | 32 | 33 |
| 2004 | 21 | 45 |
| 2005 | 19 | 46 |
| 2006 | 33 | 27 |
| 2007 | 15 | 38 |
| 2008 | 18 | 50 |
| 2009 | 18 | 54 |
| 2010 | 21 | 31 |
| 2011 | 24 | 41 |
| 2012 | 25 | 63 |
| 2013 | 37 | 92 |
| 2014 | 58 | 91 |
| 2015 | 55 | 84 |
| 2016 | 61 | 123 |
| 2017 | 93 | 132 |
| 2018 | 93 | 166 |
| 2019 | 112 | 170 |
| 2020 | 124 | 179 |
| 2021 | 114 | 224 |
| 2022 | 158 | 246 |
| 2023 | 181 | 199 |
| 2024 | 180 | 190 |
| 2025 | 183 | 179 |
| 2026 | 88 | 112 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Optical table cleaning devices and methods of cleaning optical tables6 Oct 2026US 12,752,312 B2KLA Corporation
- Directed flow pressure washer system, method and apparatus6 Oct 2026US 12,752,316 B2
- Semiconductor processing preclean methods and apparatus6 Oct 2026US 12,757,665 B2ASM IP Holding B. V.
- Processing apparatus1 Sep 2026US 12,722,187 B2Disco Corporation
- Purge device1 Sep 2026US 12,722,188 B2Murata Machinery, Ltd.
- Airflow-guided cleaning device8 Oct 2026US 2026/0307114 A1Mu-tech Precision Co., Ltd.
- Test base cleaning line and method thereof8 Oct 2026US 2026/0307115 A1Siliconware Precision Industries Co., Ltd.
- Systems and methods for providing a flow of air about a lens of a sensor of a vehicle8 Oct 2026US 2026/0307625 A1LG Innotek Co., Ltd.
- Apparatus and method for removal of oxide and carbon from semiconductor films in a single processing chamber8 Oct 2026US 2026/0314290 A1ASM IP Holding B. V.
- Method of cleaning a nozzle8 Oct 2026US 2026/0314314 A1Taiwan Semiconductor Manufacturing Company.Ltd
Most cited
By later US patents
- Method for cleaning reaction chamber using pre-cleaning process526US 9,142,393 B2ASM IP Holding B. V. · 2015
- Plasma pre-clean module and process477US 9,299,557 B2ASM IP Holding B. V. · 2016
- Plasma pre-clean module and process474US 9,514,927 B2ASM IP Holding B. V. · 2016
- Controlling gas in a multichamber processing system337US 6,224,679 B1Tokyo Electron Limited · 2001
- Copper residue chamber clean184US 9,114,438 B2APPLIED Materials.Inc. · 2015